Light receiving element, imaging element, and imaging device

ABSTRACT

The present technology relates to a light receiving element, an imaging element, and an imaging device. A light receiving element includes an on-chip lens, a wiring layer, and a semiconductor layer arranged between the on-chip lens and the wiring layer. The semiconductor layer includes a first voltage application unit to which a first voltage is applied, a second voltage application unit to which a second voltage is applied, a first charge detection unit, and a second charge detection unit. The wiring layer includes at least one layer including first voltage application wiring configured to supply the first voltage, second voltage application wiring configured to supply the second voltage, and a reflection member that overlaps the first charge detection unit or the second charge detection unit, in plan view. The present technology, for example, can be applied to a light receiving element configured to measure a distance.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/344,182 filed Apr. 23, 2019, which is a national stage applicationunder 35 U.S.C. 371 and claims the benefit of PCT Application No.PCT/JP2018/000097 having an international filing date of Jan. 5, 2018,which designated the United States, which PCT application claimed thebenefit of Japanese Patent Application Nos. 2017-007479 filed Jan. 19,2017 and 2017-248888 filed Dec. 26, 2017, the entire disclosures of eachof which are incorporated herein by reference.

TECHNICAL FIELD

The present technology relates to a light receiving element, an imagingelement, and an imaging device, and in particular, relates to a lightreceiving element, an imaging element, and an imaging device, in whichcharacteristics can be improved.

BACKGROUND ART

In the related art, a distance measuring system using an indirect timeof flight (ToF) method is known. In such a distance measuring system, asensor capable of sorting signal charges obtained by receiving activelight that is emitted by using a light emitting diode (LED) or a laserin a certain phase, and is reflected on a target, into different regionsat a high speed, is absolutely imperative.

Therefore, for example, a technology has been proposed in which avoltage is directly applied to a substrate of a sensor, and a current isgenerated in the substrate, and thus, it is possible to modulate aregion over a wide range in the substrate at a high speed (for example,refer to Patent Document 1). Such a sensor is also referred to as acurrent assisted photonic demodulator (CAPD) sensor.

CITATION LIST Patent Document

-   Patent Document 1: Japanese Patent Application Laid-Open No.    2011-86904

SUMMARY OF THE INVENTION Problems to be Solved by the Invention

However, in the technology described above, it was difficult to obtain aCAPD sensor having sufficient characteristics.

For example, the CAPD sensor described above is a front surfaceirradiation type sensor in which wiring or the like is arranged on asurface of the substrate on a side receiving light from the outside.

In order to ensure a photoelectric conversion region, it is desirablethat a constituent shielding a light path of light to be incident, suchas the wiring, is not provided on a light receiving surface side of aphotodiode (PD), that is, a photoelectric conversion unit. However, in afront surface irradiation type CAPD sensor, it is necessary to arrangewiring for charge extraction, various control lines, or a signal line onthe light receiving surface side of the PD, according to a structure,and thus, the photoelectric conversion region is limited. That is, it isnot possible to ensure a sufficient photoelectric conversion region, andthere is a case where characteristics such as a pixel sensitivitydecrease.

In addition, in the case of considering that the CAPD sensor is used inthe presence of external light, an external light component becomes anoise component for the indirect ToF method of measuring a distance byusing active light, and thus, in order to obtain distance information byensuring a sufficient signal to noise ratio (SN ratio), it is necessaryto ensure sufficient saturated signal quantity (Qs). However, in thefront surface irradiation type CAPD sensor, there is a limitation in awiring layout, and thus, it was necessary to devise to use a methodother than wiring capacity, such as a method of providing an additionaltransistor for ensuring capacity.

Further, in the front surface irradiation type CAPD sensor, a signalextraction unit referred to as a Tap, is arrange on a side of thesubstrate on which light is incident. On the other hand, in the case ofconsidering photoelectric conversion in an Si substrate, there is adifference in an attenuation rate at a wavelength of light, but a ratiothat photoelectric conversion is performed on a light incidence surfaceside, increases. For this reason, in a front surface type CAPD sensor,there is a possibility that a probability of performing thephotoelectric conversion in an inactive tap region that is a Tap regionto which the signal charge is not sorted, in a Tap region where thesignal extraction unit is provided, increases. In the indirect ToFsensor, distance measuring information is obtained by using a signalsorted to each charge accumulation region according to the phase of theactive light, and thus, a component directly subjected to thephotoelectric conversion in the inactive tap region, becomes a noise,and as a result thereof, there is a possibility that a distancemeasuring accuracy is degraded. That is, there is a possibility that thecharacteristics of the CAPD sensor decrease.

The present technology has been made in consideration of suchcircumstances, and is intended to improve characteristics.

Solutions to Problems

A light receiving element of a first aspect of the present technology,including:

an on-chip lens;

a wiring layer; and

a semiconductor layer arranged between the on-chip lens and the wiringlayer,

in which the semiconductor layer includes

a first voltage application unit to which a first voltage is applied,

a second voltage application unit to which a second voltage is applied,the second voltage being different from the first voltage,

a first charge detection unit arranged around the first voltageapplication unit, and

a second charge detection unit arranged around the second voltageapplication unit,

the wiring layer includes

at least one layer including first voltage application wiring configuredto supply the first voltage, second voltage application wiringconfigured to supply the second voltage, and a reflection member, and

the reflection member is provided to overlap with the first chargedetection unit or the second charge detection unit, in plan view.

In the first aspect of the present technology, the on-chip lens, thewiring layer, and the semiconductor layer arranged between the on-chiplens and the wiring layer, are provided, and the first voltageapplication unit to which the first voltage is applied, the secondvoltage application unit to which the second voltage is applied, thesecond voltage being different from the first voltage, the first chargedetection unit arranged around the first voltage application unit, andthe second charge detection unit arranged around the second voltageapplication unit, are provided in the semiconductor layer. At least onelayer including the first voltage application wiring configured tosupply the first voltage, the second voltage application wiringconfigured to supply the second voltage, and the reflection member, isprovided in the wiring layer, and the reflection member is provided tooverlap with the first charge detection unit or the second chargedetection unit, in plan view.

An imaging element of a second aspect of the present technology,including:

a pixel array portion including a plurality of pixels configured toperform photoelectric conversion with respect to incident light,

in which the pixel includes

a substrate configured to perform the photoelectric conversion withrespect to the incident light, and

a signal extraction unit including a voltage application unit forgenerating an electrical field by applying a voltage to the substrate,and a charge detection unit for detecting a signal carrier generated bythe photoelectric conversion, the signal extraction unit being providedon a surface of the substrate on a side opposite to an incidence surfaceon which the light is incident, in the substrate.

It is possible to form two of the signal extraction units in the pixel.

It is possible to form one of the signal extraction units in the pixel.

It is possible to form three or more of the signal extraction units inthe pixel.

It is possible to share the signal extraction unit between the pixel,and another pixel adjacent to the pixel.

It is possible to share the voltage application unit between the pixel,and another pixel adjacent to the pixel.

It is possible to provide a P type semiconductor region as the voltageapplication unit, and an N type semiconductor region as the chargedetection unit, in the signal extraction unit, the N type semiconductorregion being formed to surround the P type semiconductor region.

It is possible to provide an N type semiconductor region as the chargedetection unit, and a P type semiconductor region as the voltageapplication unit, in the signal extraction unit, the P typesemiconductor region being formed to surround the N type semiconductorregion.

It is possible to provide a first N type semiconductor region and asecond N type semiconductor region as the charge detection unit, and a Ptype semiconductor region as the voltage application unit, in the signalextraction unit, the P type semiconductor region being formed in aposition interposed between the first N type semiconductor region andthe second N type semiconductor region.

It is possible to provide a first P type semiconductor region and asecond P type semiconductor region as the voltage application unit, andan N type semiconductor region as the charge detection unit, in thesignal extraction unit, the N type semiconductor region being formed ina position interposed between the first P type semiconductor region andthe second P type semiconductor region.

It is possible to apply a voltage to the incidence surface side in thesubstrate.

It is possible to further provide a reflection member configured toreflect the light incident on the substrate from the incidence surface,in the pixel, the reflection member being formed on a surface of thesubstrate on a side opposite to the incidence surface.

It is possible for the signal carrier to include an electron.

It is possible for the signal carrier to include a hole.

It is possible to further provide a lens configured to condense thelight and to allow the light to be incident on the substrate, in thepixel.

It is possible to further provide an inter-pixel light shielding unitconfigured to shield the incident light, in the pixel, the inter-pixellight shielding unit being formed in a pixel end portion on theincidence surface of the substrate.

It is possible to further provide a pixel separation region configuredto penetrate through at least a part of the substrate and to shield theincident light, in the pixel, the pixel separation region being formedin a pixel end portion in the substrate.

It is possible for the substrate to include a P type semiconductorsubstrate having resistance of greater than or equal to 500 [Ωcm].

It is possible for the substrate to include an N type semiconductorsubstrate having resistance of greater than or equal to 500 [Ωcm].

In the second aspect of the present technology,

the pixel array portion including the plurality of pixels configured toperform the photoelectric conversion with respect to the incident light,is provided in the imaging element, and

the substrate configured to perform the photoelectric conversion withrespect to the incident light, and

the extraction unit including the signal extraction unit including thevoltage application unit for generating the electrical field by applyingthe voltage to the substrate, and the charge detection unit fordetecting the signal carrier generated by the photoelectric conversion,are provided in the pixel, the extraction unit being provided on thesurface of the substrate on a side opposite to the incidence surface onwhich the light is incident, in the substrate.

An imaging device of a third aspect of the present technology,including:

a pixel array portion including a plurality of pixels configured toperform photoelectric conversion with respect to incident light; and

a signal processor configured to calculate distance information to atarget, on a basis of a signal output from the pixel,

in which the pixel includes

a substrate configured to perform the photoelectric conversion withrespect to the incident light, and

a signal extraction unit including a voltage application unit forgenerating an electrical field by applying a voltage to the substrate,and a charge detection unit for detecting a signal carrier generated bythe photoelectric conversion, the signal extraction unit being providedon a surface of the substrate on a side opposite to an incidence surfaceon which the light is incident, in the substrate.

In the third aspect of the present technology,

the pixel array portion including the plurality of pixels configured toperform the photoelectric conversion with respect to the incident light;and

the signal processor configured to calculate the distance information tothe target, on the basis of the signal output from the pixel, areprovided in the imaging device, and

the substrate configured to perform the photoelectric conversion withrespect to the incident light, and

the extraction unit including the signal extraction unit including thevoltage application unit for generating the electrical field by applyingthe voltage to the substrate, and the charge detection unit fordetecting the signal carrier generated by the photoelectric conversion,are provided in the pixel, the extraction unit being provided on thesurface of the substrate on a side opposite to the incidence surface onwhich the light is incident, in the substrate.

Effects of the Invention

According to the first aspect to the third aspect of the presenttechnology, it is possible to improve characteristics.

Furthermore, the effects described here are not necessarily limited, butmay include any of the effects described in the present disclosure.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a diagram illustrating a configuration example of asolid-state imaging element.

FIG. 2 is a diagram illustrating a configuration example of a pixel.

FIG. 3 is a diagram illustrating a configuration example of a portion ofa signal extraction unit of the pixel.

FIG. 4 is a diagram illustrating sensitivity improvement.

FIG. 5 is a diagram illustrating improvement of a charge separationefficiency.

FIG. 6 is a diagram illustrating improvement of an extraction efficiencyof an electron.

FIG. 7 is a diagram illustrating a movement speed of a signal carrier ina front surface irradiation type.

FIG. 8 is a diagram illustrating a movement speed of a signal carrier ina rear surface irradiation type.

FIG. 9 is a diagram illustrating another configuration example of theportion of the signal extraction unit of the pixel.

FIG. 10 is a diagram illustrating a relationship between the pixel andan on-chip lens.

FIG. 11 is a diagram illustrating another configuration example of theportion of the signal extraction unit of the pixel.

FIG. 12 is a diagram illustrating another configuration example of theportion of the signal extraction unit of the pixel.

FIG. 13 is a diagram illustrating another configuration example of theportion of the signal extraction unit of the pixel.

FIG. 14 is a diagram illustrating another configuration example of theportion of the signal extraction unit of the pixel.

FIG. 15 is a diagram illustrating another configuration example of theportion of the signal extraction unit of the pixel.

FIG. 16 is a diagram illustrating another configuration example of thepixel.

FIG. 17 is a diagram illustrating another configuration example of thepixel.

FIG. 18 is a diagram illustrating another configuration example of thepixel.

FIG. 19 is a diagram illustrating another configuration example of thepixel.

FIG. 20 is a diagram illustrating another configuration example of thepixel.

FIG. 21 is a diagram illustrating another configuration example of thepixel.

FIG. 22 is a diagram illustrating another configuration example of thepixel.

FIG. 23 is a diagram illustrating another configuration example of thepixel.

FIG. 24 is a diagram illustrating another configuration example of thepixel.

FIG. 25 is a diagram illustrating another configuration example of thepixel.

FIG. 26 is a diagram illustrating another configuration example of thepixel.

FIG. 27 is a diagram illustrating another configuration example of thepixel.

FIG. 28 is a diagram illustrating another configuration example of thepixel.

FIG. 29 is a diagram illustrating another configuration example of thepixel.

FIG. 30 is a diagram illustrating another configuration example of thepixel.

FIG. 31 is a diagram illustrating an equivalent circuit of the pixel.

FIG. 32 is a diagram illustrating another equivalent circuit of thepixel.

FIG. 33 is a diagram illustrating an arrangement example of a voltagesupply line to which Periodic arrangement is adopted.

FIG. 34 is a diagram illustrating arrangement example of a voltagesupply line to which Mirror arrangement is adopted.

FIG. 35 is a diagram illustrating characteristics of the Periodicarrangement and the Mirror arrangement.

FIG. 36 is a sectional view of a plurality of pixels in a fourteenthembodiment.

FIG. 37 is a sectional view of the plurality of pixels in the fourteenthembodiment.

FIG. 38 is a sectional view of a plurality of pixels in a ninthembodiment.

FIG. 39 is a sectional view of a plurality of pixels in ModificationExample 1 of the ninth embodiment.

FIG. 40 is a sectional view of a plurality of pixels in a fifteenthembodiment.

FIG. 41 is a sectional view of a plurality of pixels in a tenthembodiment.

FIG. 42 is a diagram illustrating a metal film of five layers of amulti-layer wiring layer.

FIG. 43 is a diagram illustrating the metal film of the five layers ofthe multi-layer wiring layer.

FIG. 44 is a diagram illustrating a polysilicon layer.

FIG. 45 is a diagram illustrating a modification example of a reflectionmember formed on the metal film.

FIG. 46 is a diagram illustrating a modification example of thereflection member formed on the metal film.

FIG. 47 is a diagram illustrating a substrate configuration of thesolid-state imaging element.

FIG. 48 is a block diagram illustrating a configuration example of adistance measuring module.

FIG. 49 is a block diagram illustrating an example of a schematicconfiguration of a vehicle control system.

FIG. 50 is a diagram illustrating an example of an installation positionof a vehicle exterior information detection unit and an imaging unit.

MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments to which the present technology is applied,will be described with reference to the drawings.

First Embodiment

<Configuration Example of Solid-State Imaging Element>

The present technology is intended to improve characteristics such as apixel sensitivity by a CAPD sensor having a rear surface irradiationtype configuration.

The present technology, for example, can be applied to a solid-stateimaging element configuring a distance measuring system measuring adistance by an indirect ToF method, an imaging device including such asolid-state imaging element, or the like.

For example, the distance measuring system is mounted on a vehicle, andcan be applied to an in-vehicle system that measures a distance to atarget outside the vehicle, a gesture recognition system that measures adistance to a target such as the hand of a user, and recognizes agesture of the user on the basis of a measurement result, or the like.In this case, a gesture recognition result, for example, can be used formanipulating a car navigation system, or the like.

FIG. 1 is a diagram illustrating a configuration example of oneembodiment of a solid-state imaging element (a light receiving element)to which the present technology is applied.

A solid-state imaging element 11 illustrated in FIG. 1 is a rear surfaceirradiation type CAPD sensor, and is provided in an imaging devicehaving a distance measuring function.

The solid-state imaging element 11 includes a pixel array portion 21formed on a semiconductor substrate (not illustrated), and a peripheralcircuit portion integrated on the same semiconductor substrate as thatof the pixel array portion 21. The peripheral circuit portion, forexample, includes a vertical driving unit 22, a column processor 23, ahorizontal driving unit 24, and a system controller 25.

A signal processor 26 and a data storage unit 27 are further provided inthe solid-state imaging element 11. Furthermore, the signal processor 26and the data storage unit 27 may be mounted on the same substrate asthat of the solid-state imaging element 11, or may be arranged onanother substrate of an imaging device, different from that of thesolid-state imaging element 11.

In the pixel array portion 21, unit pixels (hereinafter, also simplyreferred to as pixels) that generate a charge according to the amount ofreceived light, and output a signal according to the charge, aretwo-dimensionally arranged in a row direction and a column direction,that is, into the shape of a matrix. That is, the pixel array portion 21includes a plurality of pixels that perform photoelectric conversionwith respect to incident light, and outputs a signal according to acharge obtained by the photoelectric conversion.

Here, the row direction indicates an array direction of the pixels in apixel row (that is, a horizontal direction), and the column directionindicates an array direction of the pixels in a pixel column (that is, avertical direction). That is, the row direction is the horizontaldirection in the drawings, and the column direction is the verticaldirection in the drawings.

In the pixel array portion 21, a pixel driving line 28 is wired alongthe row direction for each pixel row, and two vertical signal lines 29are wired along the column direction for each pixel column, with respectto a matrix-like pixel array. For example, the pixel driving line 28transmits a driving signal for performing driving at the time of readingout a signal from the pixel. Furthermore, in FIG. 1 , the pixel drivingline 28 is illustrated as one wiring, but is not limited to one wiring.One end of the pixel driving line 28 is connected to an output endcorresponding to each row of the vertical driving unit 22.

The vertical driving unit 22 includes a shift register, an addressdecoder, or the like, and drives each of the pixels of the pixel arrayportion 21, at the same time for all of the pixels, in row unit, or thelike. That is, the vertical driving unit 22 configures a driving unitcontrolling the operation of each of the pixels of the pixel arrayportion 21, along with a system controller 25 controlling the verticaldriving unit 22.

Furthermore, in distance measurement of the indirect ToF method, thenumber of elements (CAPD elements) to be driven at a high speed,connected to one control line, affects controllability of high speeddriving or a driving accuracy. There are many cases where thesolid-state imaging element used in the distance measurement of theindirect ToF method, is formed as a long pixel array in the horizontaldirection. Therefore, in such a case, the vertical signal line 29 oranother control line long in the vertical direction may be used in thecontrol line of the element to be driven at a high speed. In this case,for example, a plurality of pixels arrayed in the vertical direction,are connected to the vertical signal line 29 or another control linelong in the vertical direction, and the pixel is driven, that is, theCAPD sensor is driven by a driving unit provided separated from thevertical driving unit 22, the horizontal driving unit 24, or the like,through the vertical signal line 29 or another control line.

The signal output from each of the pixels in the pixel row according todriving control of the vertical driving unit 22, is input into thecolumn processor 23 through the vertical signal line 29. The columnprocessor 23 performs predetermined signal processing with respect tothe signal output from each of the pixels through the vertical signalline 29, and temporarily retains a pixel signal after the signalprocessing.

Specifically, the column processor 23 performs noise removal processing,analog to digital (AD) conversion processing, or the like, as the signalprocessing.

The horizontal driving unit 24 includes a shift register, an addressdecoder, or the like, and sequentially selects a unit circuitcorresponding to the pixel column of the column processor 23. Accordingto selection scanning of the horizontal driving unit 24, the pixelsignal subjected to the signal processing, is sequentially output foreach of the unit circuits in the column processor 23.

The system controller 25 includes a timing generator generating varioustiming signals, or the like, and performs driving control of thevertical driving unit 22, the column processor 23, the horizontaldriving unit 24, and the like, on the basis of various timing signalsgenerated by the timing generator.

The signal processor 26 has at least an arithmetic processing function,and performs various signal processing such as arithmetic processing, onthe basis of the pixel signal output from the column processor 23. Thedata storage unit 27 temporarily stores data necessary for the signalprocessing of the signal processor 26.

<Configuration Example of Pixel>

Next, a configuration example of the pixel provided in the pixel arrayportion 21 will be described. The pixel provided in the pixel arrayportion 21, for example, has a configuration as illustrated in FIG. 2 .

FIG. 2 illustrates a sectional surface of one pixel 51 provided in thepixel array portion 21, and the pixel 51 receives light incident fromthe outside, in particular, infrared light, performs photoelectricconversion with respect to the light, and outputs a signal according toa charge obtained by the photoelectric conversion.

The pixel 51, for example, includes a silicon substrate, that is, asubstrate 61 (a semiconductor layer) that is a P type semiconductorsubstrate including a P type semiconductor region, and an on-chip lens62 formed on the substrate 61.

For example, in the drawings, the thickness of the substrate 61 in thevertical direction, that is, the thickness of the substrate 61 in adirection vertical to the surface of the substrate 61, is less than orequal to 20 μm. Furthermore, the thickness of the substrate 61 may begreater than or equal to 20 μm, and it is sufficient that the thicknessis set according to target characteristics of the solid-state imagingelement 11, or the like.

In addition, the substrate 61, for example, includes a P-Epi substratehaving high resistance, of which a substrate concentration is less thanor equal to 1E+13 order, or the like, and the resistance (a resistivity)of the substrate 61, for example, is greater than or equal to 500 [Ωcm].

Here, in a relationship between the substrate concentration and theresistance of the substrate 61, for example, the resistance is 2000[Ωcm] when the substrate concentration is 6.48E+12 [cm³], the resistanceis 1000 [Ωcm] when the substrate concentration is 1.30E+13 [cm³], theresistance is 500 [Ωcm] when the substrate concentration is 2.59E+13[cm³], the resistance is 100 [Ωcm] when the substrate concentration is1.30E+14 [cm³], and the like.

In the drawings, the on-chip lens 62 that condenses the light incidentfrom the outside and allows the light to be incident on the substrate61, is formed on a front surface of the substrate 61 on an upper side,that is, a surface of the substrate 61 on a side on which light isincident from the outside (hereinafter, also referred to as an incidencesurface).

Further, in the pixel 51, an inter-pixel light shielding unit 63-1 andan inter-pixel light shielding unit 63-2 for preventing a color mixturebetween the adjacent pixels, are formed in an end portion of the pixel51 on the incidence surface of the substrate 61.

In this example, the light from the outside is incident on the substrate61 through the on-chip lens 62, but the light incident from the outsideis not incident on a region of the other pixel provided adjacent to thepixel 51 of the substrate 61, through the on-chip lens 62 or a part ofthe substrate 61. That is, the light that is incident on the on-chiplens 62 from the outside and is directed towards the other pixeladjacent to the pixel 51, is shielded by the inter-pixel light shieldingunit 63-1 or the inter-pixel light shielding unit 63-2, and is notincident on the adjacent other pixel. Hereinafter, in a case where it isnot necessary to particularly discriminate the inter-pixel lightshielding unit 63-1 from the inter-pixel light shielding unit 63-2, theinter-pixel light shielding unit 63-1 and the inter-pixel lightshielding unit 63-2 will be also simply referred to as an inter-pixellight shielding unit 63.

The solid-state imaging element 11 is the rear surface irradiation typeCAPD sensor, and thus, the incidence surface of the substrate 61 is aso-called rear surface, and a wiring layer including wiring or the like,is not formed on the rear surface. In addition, the wiring layerincluding wiring for driving a transistor or the like, formed in thepixel 51, wiring for reading out the signal from the pixel 51, or thelike, is formed by being laminated, in a portion of a surface of thesubstrate 61 on a side opposite to the incidence surface.

An oxide film 64, and a signal extraction unit 65-1 and a signalextraction unit 65-2, referred to as a Tap, are formed on the surface ofthe substrate 61 on a side opposite to the incidence surface, that is,in the drawings, in a portion on an inner side of a surface on a lowerside.

In this example, the oxide film 64 is formed in the center portion ofthe pixel 51 in the vicinity of the surface of the substrate 61 on aside opposite to the incidence surface, and the signal extraction unit65-1 and the signal extraction unit 65-2 are formed on both ends of theoxide film 64, respectively.

Here, the signal extraction unit 65-1 includes an N+ semiconductorregion 71-1 that is an N type semiconductor region, an N− semiconductorregion 72-1 having a donor impurity concentration lower than that of theN+ semiconductor region 71-1, a P+ semiconductor region 73-1 that is a Ptype semiconductor region, and a P− semiconductor region 74-1 having anacceptor impurity concentration lower than that of the P+ semiconductorregion 73-1. Here, examples of the donor impurity include elementsbelonging to Group 5 of the periodic table of elements, such asphosphorus (P) or arsenic (As), with respect to Si, and examples of theacceptor impurity include elements belonging to Group 3 of the periodictable of elements, such as boron (B), with respect to Si. The element tobe the donor impurity, will be referred to as a donor element, and theelement to be the acceptor impurity, will be referred to as an acceptorelement.

That is, in the drawings, the N+ semiconductor region 71-1 is formed ina position adjacent to a right side of the oxide film 64, in a portionon a front inner side of the surface of the substrate 61 on a sideopposite to the incidence surface. In addition, in the drawings, the N−semiconductor region 72-1 is formed on an upper side of the N+semiconductor region 71-1 to cover (to surround) the N+ semiconductorregion 71-1.

Further, in the drawings, the P+ semiconductor region 73-1 is formed ina position adjacent to a right side of the N+ semiconductor region 71-1,in a portion on a front inner side of the surface of the substrate 61 ona side opposite to the incidence surface. In addition, in the drawings,the P− semiconductor region 74-1 is formed on an upper side of the P+semiconductor region 73-1 to cover (to surround) the P+ semiconductorregion 73-1.

Furthermore, here, even though it is not illustrated, more specifically,when the substrate 61 is seen from the direction vertical to the surfaceof the substrate 61, the N+ semiconductor region 71-1 and the N−semiconductor region 72-1 are formed to surround the P+ semiconductorregion 73-1 and the P− semiconductor region 74-1 around the P+semiconductor region 73-1 and the P− semiconductor region 74-1.

Similarly, the signal extraction unit 65-2 includes an N+ semiconductorregion 71-2 that is an N type semiconductor region, an N− semiconductorregion 72-2 having a donor impurity concentration lower than that of theN+ semiconductor region 71-2, a P+ semiconductor region 73-2 that is a Ptype semiconductor region, and a P− semiconductor region 74-2 having anacceptor impurity concentration lower than that of the P+ semiconductorregion 73-2.

That is, in the drawings, the N+ semiconductor region 71-2 is formed ina position adjacent to a left side of the oxide film 64, in a portion ona front inner side of the surface of the substrate 61 on a side oppositeto the incidence surface. In addition, in the drawings, the N−semiconductor region 72-2 is formed on an upper side of the N+semiconductor region 71-2 to cover (to surround) the N+ semiconductorregion 71-2.

Further, in the drawings, the P+ semiconductor region 73-2 is formed ina position adjacent to a left side of the N+ semiconductor region 71-2,in a portion on a front inner side of the surface of the substrate 61 ona side opposite to the incidence surface. In addition, in the drawings,the P− semiconductor region 74-2 is formed on an upper side of the P+semiconductor region 73-2 to cover (to surround) the P+ semiconductorregion 73-2.

Furthermore, here, even though it is not illustrated, more specifically,when the substrate 61 is seen from the direction vertical to the surfaceof the substrate 61, the N+ semiconductor region 71-2 and the N−semiconductor region 72-2 are formed to surround the P+ semiconductorregion 73-2 and the P− semiconductor region 74-2 around the P+semiconductor region 73-2 and the P− semiconductor region 74-2.

Hereinafter, in a case where it is not necessary to particularlydiscriminate the signal extraction unit 65-1 from the signal extractionunit 65-2, the signal extraction unit 65-1 and the signal extractionunit 65-2 will also be simply referred to as a signal extraction unit65.

In addition, hereinafter, in a case where it is not necessary toparticularly discriminate the N+ semiconductor region 71-1 from the N+semiconductor region 71-2, the N+ semiconductor region 71-1 and the N+semiconductor region 71-2 will also be simply referred to as an N+semiconductor region 71, and in a case where it is not necessary toparticularly discriminate the N− semiconductor region 72-1 from the N−semiconductor region 72-2, the N− semiconductor region 72-1 and the N−semiconductor region 72-2 will also be simply referred to as an N−semiconductor region 72.

Further, hereinafter, in a case where it is not necessary toparticularly discriminate the P+ semiconductor region 73-1 from the P+semiconductor region 73-2, the P+ semiconductor region 73-1 and the P+semiconductor region 73-2 will also be simply referred to as a P+semiconductor region 73, and in a case where it is not necessary toparticularly discriminate the P− semiconductor region 74-1 from the P−semiconductor region 74-2, the P− semiconductor region 74-1 and the P−semiconductor region 74-2 will also be simply referred to as a P−semiconductor region 74.

In addition, in the substrate 61, a separation portion 75-1 forseparating a region between the N+ semiconductor region 71-1 and the P+semiconductor region 73-1, includes an oxide film or the like.Similarly, a separation portion 75-2 for separating a region between theN+ semiconductor region 71-2 and the P+ semiconductor region 73-2,includes an oxide film or the like. Hereinafter, in a case where it isnot necessary to particularly discriminate the separation portion 75-1from the separation portion 75-2, the separation portion 75-1 and theseparation portion 75-2 will also be simply referred to as a separationportion 75.

The N+ semiconductor region 71 provided on the substrate 61 functions asa charge detection unit for detecting the amount of light incident onthe pixel 51 from the outside, that is, the amount of signal carriergenerated by the photoelectric conversion of the substrate 61.Furthermore, the N− semiconductor region 72 having a low donor impurityconcentration, can also be regarded as the charge detection unit, inaddition to the N+ semiconductor region 71. In addition, the P+semiconductor region 73 functions as a voltage application unit forinjecting a plurality of carrier currents into the substrate 61, thatis, for generating an electrical field in the substrate 61 by directlyapplying a voltage to the substrate 61. Furthermore, the P−semiconductor region 74 having a low acceptor impurity concentration,can also be regarded as the voltage application unit, in addition to theP+ semiconductor region 73.

In the pixel 51, a floating diffusion (FD) portion that is a floatingdiffusion region (not illustrated) (hereinafter, in particular, alsoreferred to as an FD portion A), is directly connected to the N+semiconductor region 71-1, and the FD portion A is further connected tothe vertical signal line 29 through an amplification transistor (notillustrated) or the like.

Similarly, the other FD portion different from the FD portion A(hereinafter, in particular, also referred to as an FD portion B) isdirectly connected to the N+ semiconductor region 71-2, the FD portion Bis further connected to the vertical signal line 29 through anamplification transistor (not illustrated) or the like. Here, the FDportion A and the FD portion B are connected to the vertical signallines 29 different from each other.

For example, in the case of measuring the distance to the target by theindirect ToF method, infrared light is emitted from the imaging devicein which the solid-state imaging element 11 is provided towards thetarget. Then, in a case where the infrared light is reflected on thetarget, and is returned to the imaging device as reflection light, thesubstrate 61 of the solid-state imaging element 11 receives thereflection light (the infrared light) that has been incident, andperforms the photoelectric conversion.

At this time, the vertical driving unit 22 drives the pixel 51, andsorts the signal according to the charge obtained by the photoelectricconversion, into the FD portion A and the FD portion B. Furthermore, asdescribed above, the pixel 51 may be driven not by the vertical drivingunit 22, but by a driving unit that is separately provided, thehorizontal driving unit 24, or the like, through the vertical signalline 29 or another control line long in the vertical direction.

For example, the vertical driving unit 22 applies a voltage to two P+semiconductor regions 73 through a contact or the like, at a certaintiming. Specifically, for example, the vertical driving unit 22 appliesa voltage of 1.5 V to the P+ semiconductor region 73-1, and applies avoltage of 0 V to the P+ semiconductor region 73-2.

Then, an electrical field is generated between two P+ semiconductorregions 73 in the substrate 61, and a current flows from the P+semiconductor region 73-1 to the P+ semiconductor region 73-2. In thiscase, a hole in the substrate 61 is moved in the direction of the P+semiconductor region 73-2, and thus, an electron is moved in thedirection of the P+ semiconductor region 73-1.

Therefore, in such a state, in a case where the infrared light (thereflection light) from the outside is incident on the substrate 61through the on-chip lens 62, and the infrared light is subjected to thephotoelectric conversion of the substrate 61, and is converted into apair of the electron and the hole, the obtained electron is guided inthe direction of the P+ semiconductor region 73-1 by the electricalfield between the P+ semiconductor regions 73, and is moved into the N+semiconductor region 71-1.

In this case, the electron generated by the photoelectric conversion, isused as a signal carrier for detecting a signal according to the amountof infrared light incident on the pixel 51, that is, the amount ofreceived infrared light.

With this arrangement, a charge according to the electron moved into theN+ semiconductor region 71-1, is accumulated in the N+ semiconductorregion 71-1, and the charge is detected by the column processor 23through the FD portion A, the amplification transistor, the verticalsignal line 29, or the like.

That is, the accumulated charge of the N+ semiconductor region 71-1 istransferred to the FD portion A that is directly connected to the N+semiconductor region 71-1, and the signal according to the chargetransferred to the FD portion A, is read out by the column processor 23through the amplification transistor or the vertical signal line 29.Then, processing such as AD conversion processing, is performed withrespect to the read signal, in the column processor 23, and a pixelsignal obtained by the processing, is supplied to the signal processor26.

The pixel signal is a signal indicating the amount of charge accordingto the electron detected by the N+ semiconductor region 71-1, that is,the amount of charge accumulated in the FD portion A. In other words,the pixel signal can be a signal indicating the amount of infrared lightreceived by the pixel 51.

Furthermore, at this time, as with the N+ semiconductor region 71-1, thepixel signal according to the electron detected by the N+ semiconductorregion 71-2, may suitably be used for measuring a distance.

In addition, at the next timing, a voltage is applied to two P+semiconductor regions 73 by the vertical driving unit 22 through acontact or the like, such that an electrical field in a directionopposite to the electrical field generated in the substrate 61 so far,is generated. Specifically, for example, a voltage of 1.5 V is appliedto the P+ semiconductor region 73-2, and a voltage of 0 V is applied tothe P+ semiconductor region 73-1.

With this arrangement, the electrical field is generated between two P+semiconductor regions 73 on the substrate 61, and a current flows fromthe P+ semiconductor region 73-2 to the P+ semiconductor region 73-1.

In such a state, in a case where the infrared light (the reflectionlight) from the outside is incident on the substrate 61 through theon-chip lens 62, and the infrared light is subjected to thephotoelectric conversion in the substrate 61, and is converted into apair of the electron and the hole, the obtained electron is guided inthe direction of the P+ semiconductor region 73-2 by the electricalfield between the P+ semiconductor regions 73, and is moved into the N+semiconductor region 71-2.

With this arrangement, a charge according to the electron moved into theN+ semiconductor region 71-2, is accumulated in the N+ semiconductorregion 71-2, and the charge is detected by the column processor 23through the FD portion B, the amplification transistor, the verticalsignal line 29, or the like.

That is, the accumulated charge of the N+ semiconductor region 71-2 istransferred to the FD portion B that is directly connected to the N+semiconductor region 71-2, and the signal according to the chargetransferred to the FD portion B is read out by the column processor 23through the amplification transistor or the vertical signal line 29.Then, processing such as AD conversion processing, is performed withrespect to the read signal, in the column processor 23, and a pixelsignal obtained by the processing, is supplied to the signal processor26.

Furthermore, at this time, as with the N+ semiconductor region 71-2, thepixel signal according to the electron detected by the N+ semiconductorregion 71-1, may be suitably used for measuring a distance.

Thus, in the case of obtaining the pixel signals obtained by thephotoelectric conversion in periods different from each other, in thesame pixel 51, the signal processor 26 calculates distance informationindicating the distance to the target, on the basis of the pixelsignals, and outputs the distance information to the subsequent stage.

Thus, a method of sorting the signal carriers into the N+ semiconductorregions 71 different from each other, and of calculating the distanceinformation, on the basis of the signal according to the signalcarriers, will be referred to as the indirect ToF method.

Furthermore, here, an example has been described in which theapplication of the voltage with respect to the P+ semiconductor region73 is controlled by the vertical driving unit 22, as described above, adriving unit (a block) functioning as a voltage applying controllercontrolling the application of the voltage with respect to the P+semiconductor region 73, may be provided in the solid-state imagingelement 11, separately from the vertical driving unit 22.

In addition, in a case where a portion of the signal extraction unit 65in the pixel 51, is seen from a direction from the top to the bottom inFIG. 2 , that is, the direction vertical to the surface of the substrate61, for example, as illustrated in FIG. 3 , the P+ semiconductor region73 is surrounded by the N+ semiconductor region 71. Furthermore, in FIG.3 , the same reference numerals will be applied to portionscorresponding to those in FIG. 2 , and the description thereof will besuitably omitted.

In the example illustrated in FIG. 3 , the oxide film 64 (notillustrated) is formed in the central portion of the pixel 51, and thesignal extraction unit 65 is formed in a portion slightly on an end sidefrom the center of the pixel 51. In particular, here, two signalextraction units 65 are formed in the pixel 51.

Then, in each of the signal extraction units 65, the P+ semiconductorregion 73 is formed in the center position into the shape of arectangle, and the P+ semiconductor region 73 is surrounded by arectangular N+ semiconductor region 71, more specifically, a rectangularframe-like N+ semiconductor region 71, around the P+ semiconductorregion 73. That is, the N+ semiconductor region 71 is formed to surroundthe P+ semiconductor region 73.

In addition, in the pixel 51, the on-chip lens 62 is formed such thatthe infrared light incident from the outside is condensed in the centerportion of the pixel 51, that is, in a portion illustrated by an arrowA11. In other words, the infrared light incident on the on-chip lens 62from the outside is condensed by the on-chip lens 62, in the positionillustrated by the arrow A11, that is, in FIG. 2 , a position of theoxide film 64 on an upper side of FIG. 2 .

Therefore, the infrared light is condensed in a position between thesignal extraction unit 65-1 and the signal extraction unit 65-2. Withthis arrangement, it is possible to prevent the infrared light frombeing incident on a pixel adjacent to the pixel 51 and from causing acolor mixture, and to prevent the infrared light from being directlyincident on the signal extraction unit 65.

For example, in a case where the infrared light is directly incident onthe signal extraction unit 65, a charge separation efficiency, that is,a contrast between active and inactive tap (Cmod) or a Modulationcontrast decreases.

Here, the signal extraction unit 65 (the tap) in which the signalaccording to the charge (the electron) obtained by the photoelectricconversion is read out, that is, the signal extraction unit 65 in whichthe charge obtained by the photoelectric conversion detected, will alsobe referred to as an active tap.

On the contrary, the signal extraction unit 65 (the tap) in which thesignal according to the charge obtained by the photoelectric conversionis not basically read out, that is, the signal extraction unit 65 thatis not the active tap, will also be referred to as an inactive tap.

In the example described above, the signal extraction unit 65 in which avoltage of 1.5 V is applied to the P+ semiconductor region 73, is theactive tap, and the signal extraction unit 65 in which a voltage of 0 Vis applied to the P+ semiconductor region 73, is the inactive tap.

The Cmod is an index indicating what percentage of the charge can bedetected by the N+ semiconductor region 71 of the signal extraction unit65 that is the active tap, in the charges generated by the photoelectricconversion of the incident infrared light, that is, whether or not thesignal according to the charge is extracted, and indicates the chargeseparation efficiency.

Therefore, for example, in a case where the infrared light incident fromthe outside is incident on a region of the inactive tap, and thephotoelectric conversion is performed in the inactive tap, a possibilitythat an electron that is the signal carrier generated by thephotoelectric conversion, is moved to the N+ semiconductor region 71 inthe inactive tap, is high. Then, a charge of a part of the electronsobtained by the photoelectric conversion, is not detected by the N+semiconductor region 71 in the active tap, and thus, the Cmod, that is,the charge separation efficiency decreases.

Therefore, in the pixel 51, the infrared light is condensed in thevicinity of the center portion of the pixel 51 in a position of anapproximately equal distance from two signal extraction units 65, andthus, a probability that the infrared light incident from the outside issubjected to the photoelectric conversion in the region of the inactivetap, is reduced, and the charge separation efficiency can be improved.In addition, in the pixel 51, it is also possible to improve theModulation contrast. In other words, the electron obtained by thephotoelectric conversion can be easily induced to the N+ semiconductorregion 71 in the active tap.

According to the solid-state imaging element 11 as described above, thefollowing effects can be obtained.

That is, first, the solid-state imaging element 11 is the rear surfaceirradiation type sensor, and thus, it is possible to maximize QuantumEfficiency (QE)×Aperture Ratio (Fill Factor (FF)), and to improvedistance measuring characteristics of the solid-state imaging element11.

For example, as illustrated by the arrow W11 in FIG. 4 , a general frontsurface irradiation type image sensor has a structure in which wiring102 or wiring 103 is formed on an incidence surface side of a PD 101that is a photoelectric conversion unit on which light from the outsideis incident.

For this reason, for example, as illustrated by an arrow A21 or an arrowA22, there is a case where a part of light obliquely incident on the PD101 with a certain degree of angle, from the outside, is not incident onthe PD 101 by being shielded by the wiring 102 or the wiring 103.

In contrast, the rear surface irradiation type image sensor, forexample, as illustrated by an arrow W12, has a structure in which thewiring 105 or the wiring 106 is formed on a surface of a PD 104 that isthe photoelectric conversion unit, on a side opposite to an incidencesurface on which light is incident from the outside.

For this reason, it is possible to ensure a sufficient aperture ratio,compared to the front surface irradiation type image sensor. That is,for example, as illustrated by an arrow A23 or an arrow A24, lightobliquely incident on the PD 104 with a certain degree of angle, fromthe outside, is incident on the PD 104 without being shielded by thewiring. With this arrangement, it is possible to improve pixelsensitivity by receiving more light.

Such an improvement effect of the pixel sensitivity to be obtained bythe rear surface irradiation type image sensor, can also be obtained inthe solid-state imaging element 11 that is the rear surface irradiationtype CAPD sensor.

In addition, for example, in the front surface irradiation type CAPDsensor, as illustrated by an arrow W13, a signal extraction unit 112 tobe referred to as a tap, more specifically, a P+ semiconductor region oran N+ semiconductor region of the tap is formed on an incidence surfaceside on which light from the outside is incident, in a PD 111 that isthe photoelectric conversion unit. In addition, the front surfaceirradiation type CAPD sensor has a structure in which wiring 113, orwiring 114 connected to the signal extraction unit 112, such as acontact or a metal, is formed incidence surface side.

For this reason, for example, there is a case where as illustrated by anarrow A25 or an arrow A26, a part of light obliquely incident on the PD111 with a certain degree of angle, from the outside, is not incident onthe PD 111 by being shielded by the wiring 113 or the like, and asillustrated by an arrow A27, light vertically incident on the PD 111 isalso not incident on the PD 111 by being shielded by the wiring 114.

In contrast, the rear surface irradiation type CAPD sensor, for example,as illustrated by an arrow W14, has a structure in which a signalextraction unit 116 is formed in a portion of a surface of a PD 115 thatis the photoelectric conversion unit, on a side opposite to an incidencesurface on which light from the outside is incident. In addition, wiring117, or wiring 118 connected to the signal extraction unit 116, such asa contact or a metal, is formed on the surface of the PD 115 on a sideopposite to the incidence surface.

Here, the PD 115 corresponds to the substrate 61 illustrated in FIG. 2 ,and the signal extraction unit 116 corresponds to the signal extractionunit 65 illustrated in FIG. 2 .

In the rear surface irradiation type CAPD sensor having such astructure, it is possible to ensure a sufficient aperture ratio,compared to the front surface irradiation type sensor. Therefore, it ispossible to maximize Quantum Efficiency (QE)×Aperture Ratio (FF), and toimprove the distance measuring characteristics.

That is, for example, as illustrated by an arrow A28 or an arrow A29,light obliquely incident on the PD 115 with a certain degree of angle,from the outside, is incident on the PD 115 without being shielded bythe wiring. Similarly, as illustrated by an arrow A30, light verticallyincident on the PD 115 is also incident on the PD 115 without beingshielded by the wiring or the like.

Thus, in the rear surface irradiation type CAPD sensor, it is possibleto receive not only the light that is incident with a certain degree ofangle, but also the light that is vertically incident on the PD 115, andis reflected on the wiring or the like connected to the signalextraction unit (the tap) in the front surface irradiation type sensor.With this arrangement, it is possible to improve the pixel sensitivityby receiving more light. In other words, it is possible to maximizeQuantum Efficiency (QE)×Aperture Ratio (FF), and thus, to improve thedistance measuring characteristics.

In particular, in a case where the tap is arranged in the vicinity ofthe center of the pixel, but not on the outer edge of the pixel, in thefront surface irradiation type CAPD sensor, it is no possible to ensurea sufficient aperture ratio, and the pixel sensitivity decreases, but inthe solid-state imaging element 11 that is the rear surface irradiationtype CAPD sensor, it is possible to ensure a sufficient aperture ratioregardless of an arrangement position of the tap, and to improve thepixel sensitivity.

In addition, the signal extraction unit 65 is formed in the vicinity ofthe rear surface irradiation type solid-state imaging element 11, thesurface of the substrate 61 on a side opposite to the incidence surfaceon which the infrared light from the outside is incident, and thus, itis possible to reduce the occurrence of the photoelectric conversion ofthe infrared light in the region of the inactive tap. With thisarrangement, the Cmod, that is, the charge separation efficiency can beimproved.

FIG. 5 illustrates a pixel sectional view of the front surfaceirradiation type CAPD sensor and the rear surface irradiation type CAPDsensor.

In the front surface irradiation type CAPD sensor on a left side in FIG.5 , in the drawings, an upper side of the substrate 141 is a lightincidence surface, and a wiring layer 152 including a plurality oflayers of wirings, an inter-pixel light shielding unit 153, and anon-chip lens 154 are laminated on the incidence surface side of thesubstrate 141.

In the rear surface irradiation type CAPD sensor on a right side in FIG.5 , in the drawings, a wiring layer 152 including a plurality of layersof wirings is formed on a lower side of a substrate 142 on a sideopposite to a light incidence surface, and an inter-pixel lightshielding unit 153 and an on-chip lens 154 are laminated on an upperside of the substrate 142 on the light incidence surface side.

Furthermore, in FIG. 5 , a gray trapezoid illustrates a region in whichinfrared light is condensed by the on-chip lens 154, and thus, a lightintensity is strong.

For example, in the front surface irradiation type CAPD sensor, a regionR11 in which the inactive tap and the active tap exist, is provided onthe incidence surface side of the substrate 141. For this reason, in acase where there are many components to be directly incident on theinactive tap, and the photoelectric conversion is performed in theregion of the inactive tap, the signal carrier obtained by thephotoelectric conversion is not detected by the N+ semiconductor regionof the active tap.

In the front surface irradiation type CAPD sensor, the intensity of theinfrared light is strong in the region R11 in the vicinity of theincidence surface of the substrate 141, and thus, a probability that thephotoelectric conversion of the infrared light is performed in theregion R11, increases. That is, the amount of infrared light incident onthe vicinity of the inactive tap, is large, and thus, the signal carrierthat is not capable of being detected in the active tap, increases, andthe charge separation efficiency decreases.

In contrast, in the rear surface irradiation type CAPD sensor, a regionR12 in which the inactive tap and the active tap exist, is provided in aposition far from the incidence surface of the substrate 142, that is, aposition in the vicinity of the surface opposite to the incidencesurface side. Here, the substrate 142 corresponds to the substrate 61illustrated in FIG. 2 .

In this example, the region R12 is provided in a portion of the surfaceof the substrate 142 on a side opposite to the incidence surface side,and the region R12 is in the position far from the incidence surface,and thus, the intensity of the incident infrared light becomescomparatively weak, in the vicinity of the region R12.

In a region where the intensity of the infrared light is strong, such asthe vicinity of the center of the substrate 142 or the vicinity of theincidence surface, the signal carrier obtained by the photoelectricconversion is guided to the active tap by an electrical field generatedin the substrate 142, and is detected by the N+ semiconductor region ofthe active tap.

On the other hand, in the vicinity of the region R12 including theinactive tap, the intensity of the incident infrared light iscomparatively weak, and thus, a probability that the photoelectricconversion of the infrared light is performed in the region R12,decreases. That is, the amount of infrared light incident on thevicinity of the inactive tap is small, and thus, the number of signalcarriers (electrons) that are generated by the photoelectric conversionin the vicinity of the inactive tap, and are moved to the N+semiconductor region of the inactive tap, decreases, and it is possibleto improve the charge separation efficiency. As a result thereof, it ispossible to improve the distance measuring characteristics.

Further, in the rear surface irradiation type solid-state imagingelement 11, it is possible to realize the thinning of the substrate 61,and thus, it is possible to improve an extraction efficiency of theelectron (the charge) that is the signal carrier.

For example, in the front surface irradiation type CAPD sensor, it isnot possible to sufficiently ensure the aperture ratio, and thus, asillustrated by an arrow W31 in FIG. 6 , in order to ensure a higherquantum efficiency, and to suppress a decrease in QuantumEfficiency×Aperture Ratio, it is necessary to increase the thickness ofa substrate 171 to a certain degree.

Then, in a region in the vicinity of a surface of the substrate 171 on aside opposite to an incidence surface, for example, a portion of aregion R21, the inclination of a potential becomes gentle, and anelectrical field in a direction substantially vertical to the substrate171 becomes weak. In this case, a movement speed of the signal carrierbecomes slow, and thus, a time required to detect the signal carrier inthe N+ semiconductor region of the active tap after the photoelectricconversion is performed, becomes long. Furthermore, in FIG. 6 , an arrowin the substrate 171 indicates the electrical field in the directionvertical to the substrate 171, in the substrate 171.

In addition, in a case where the substrate 171 is thick, a movementdistance of the signal carrier from a position far from the active tapin the substrate 171, to the N+ semiconductor region in the active tap,becomes long. Therefore, in the position far from the active tap, a timerequired to detect the signal carrier in the N+ semiconductor region ofthe active tap after the photoelectric conversion is performed, becomeslonger.

FIG. 7 illustrates a relationship between a position in a thicknessdirection of the substrate 171 and the movement speed of the signalcarrier. The region R21 corresponds to a diffusion current region.

Thus, in a case where the substrate 171 becomes thick, for example, whena driving frequency is high, that is, when the switching between anactive state and an inactive state of the tap (the signal extractionunit) is performed at a high speed, the electron generated in theposition far from the active tap such as the region R21, is not capableof being completely drawn in the N+ semiconductor region of the activetap. That is, in a case where a time when the tap is in an active state,is short, the electron (the charge) generated in the region R21 or thelike, is not capable of being detected in the N+ semiconductor region ofthe active tap, and the extraction efficiency of the electron decreases.

In contrast, in the rear surface irradiation type CAPD sensor, it ispossible to ensure a sufficient aperture ratio, and thus, for example,as illustrated by an arrow W32 in FIG. 6 , even in a case where asubstrate 172 is thin, it is possible to ensure sufficient QuantumEfficiency×Aperture Ratio. Here, the substrate 172 corresponds to thesubstrate 61 in FIG. 2 , and a narrow in the substrate 172 indicates anelectrical field in a direction vertical to the substrate 172.

FIG. 8 illustrates a relationship between a position in a thicknessdirection of the substrate 172, and the movement speed of the signalcarrier.

Thus, in a case where the thickness of the substrate 172 in thedirection vertical to the substrate 172, an electrical field in thedirection substantially vertical to the substrate 172 becomes strong,only an electron (a charge) only in a drift current region where themovement speed of the signal carrier is fast, is used, and an electronin a diffusion current region where the movement speed of the signalcarrier is slow, is not used. Only the electron (the charge) only in thedrift current region, is used, and thus, a time required to detect thesignal carrier in the N+ semiconductor region of the active tap afterthe photoelectric conversion is performed, becomes short. In addition,in a case where the substrate 172 becomes thin, the movement distance ofthe signal carrier to the N+ semiconductor region in the active tap,also becomes short.

Accordingly, in the rear surface irradiation type CAPD sensor, even whenthe driving frequency is high, it is possible to sufficiently draw thesignal carrier (the electron) generated in each region in the substrate172, in the N+ semiconductor region of the active tap, and to improvethe extraction efficiency of the electron.

In addition, it is possible to ensure a sufficient extraction efficiencyof the electron even at a higher driving frequency, according to thethinning of the substrate 172, and to improve high speed drivingresistance.

In particular, in the rear surface irradiation type CAPD sensor, it ispossible to directly apply a voltage to the substrate 172, that is, thesubstrate 61, and thus, a response speed of switching between the activestate and the inactive state of the tap, is fast, and it is possible toperform the driving at a high driving frequency. In addition, thevoltage can be directly applied to the substrate 61, and thus, amodulable region in the substrate 61, becomes wide.

Further, in the rear surface irradiation type solid-state imagingelement 11 (the CAPD sensor), it is possible to obtain a sufficientaperture ratio, and thus, it is possible to miniaturize the pixel, andto improve miniaturization resistance of the pixel.

In addition, the solid-state imaging element 11 is the rear surfaceirradiation type sensor, and thus, it is possible to liberalize back endof line (BEOL) capacity design, and with this arrangement, it ispossible to improve a design freedom of saturated signal quantity (Qs).

Modification Example 1 of First Embodiment

<Configuration Example of Pixel>

Furthermore, in the above description, as illustrated in FIG. 3 , a casewhere the portion of the signal extraction unit 65 in the substrate 61is a region in which the N+ semiconductor region 71 and the P+semiconductor region 73 are in the shape of a rectangle, has beendescribed as an example. However, the shape of the N+ semiconductorregion 71 and the P+ semiconductor region 73 at the time of being seenfrom the direction vertical to the substrate 61 may be any shape.

Specifically, for example, as illustrated in FIG. 9 , the N+semiconductor region 71 and the P+ semiconductor region 73 may be in theshape of a circle. Furthermore, in FIG. 9 , the same reference numeralswill be applied to portions corresponding to those in FIG. 3 , and thedescription thereof will be suitably omitted.

FIG. 9 illustrates the N+ semiconductor region 71 and the P+semiconductor region 73 when the portion of the signal extraction unit65 in the pixel 51 is seen from the direction vertical to the substrate61.

In this example, the oxide film 64 (not illustrated) is formed in thecentral portion of the pixel 51, and the signal extraction unit 65 isformed in the portion slightly on the end side from the center of thepixel 51. In particular, here, two signal extraction units 65 are formedin the pixel 51.

Then, in each of the signal extraction units 65, a circular P+semiconductor region 73 is formed in the center position, and the P+semiconductor region 73, is surrounded by a circular N+ semiconductorregion 71, more specifically, an annular N+ semiconductor region 71,around the P+ semiconductor region 73.

FIG. 10 is a plan view in which the on-chip lens 62 overlaps with a partof the pixel array portion 21 in which the pixels 51 including thesignal extraction unit 65 illustrated in FIG. 9 , are two-dimensionallyarranged into the shape of a matrix.

As illustrated in FIG. 10 , the on-chip lens 62 is formed in pixel unit.In other words, a unit region in which one on-chip lens 62 is formed,corresponds to one pixel.

Furthermore, in FIG. 2 , the separation portion 75 including the oxidefilm or the like, is arranged between the N+ semiconductor region 71 andthe P+ semiconductor region 73, but the separation portion 75 is notlimited thereto.

Modification Example 2 of First Embodiment

<Configuration Example of Pixel>

FIG. 11 is a plan view illustrating a modification example of a planarshape of the signal extraction unit 65 in the pixel 51.

The planar shape of the signal extraction unit 65, for example, may bean octagonal shape illustrated in FIG. 11 , in addition to therectangular shape illustrated in FIG. 3 and the circular shapeillustrated in FIG. 7 .

In addition, FIG. 11 illustrates a plan view in a case where theseparation portion 75 including the oxide film or the like, is formedbetween the N+ semiconductor region 71 and the P+ semiconductor region73.

In FIG. 11 , line A-A′ indicates a sectional line in FIG. 37 asdescribed later, and line B-B′ indicates a sectional line in FIG. 36 asdescribed later.

Second Embodiment

<Configuration Example of Pixel>

Further, in the above description, in the signal extraction unit 65, aconfiguration in which the P+ semiconductor region 73 is surrounded bythe N+ semiconductor region 71, has been described as an example, butthe N+ semiconductor region may be surrounded by the P+ semiconductorregion.

In such a case, the pixel 51, for example, is configured as illustratedin FIG. 12 . Furthermore, in FIG. 12 , the same reference numerals willbe applied to portions corresponding to those in FIG. 3 , and thedescription thereof will be suitably omitted.

FIG. 12 illustrates the arrangement of the N+ semiconductor region andthe P+ semiconductor region when the portion of the signal extractionunit 65 in the pixel 51 is seen from the direction vertical to thesubstrate 61.

In this example, the oxide film 64 (not illustrated) is formed in thecentral portion of the pixel 51, the signal extraction unit 65-1 isformed a portion slightly on an upper side in the drawings from thecenter of the pixel 51, and the signal extraction unit 65-2 is formed ina portion slightly on a lower side in the drawings from the center ofthe pixel 51. In particular, in this example, a formation position ofthe signal extraction unit 65 in the pixel 51 is the same position asthat in FIG. 3 .

In the signal extraction unit 65-1, a rectangular N+ semiconductorregion 201-1 corresponding to the N+ semiconductor region 71-1illustrated in FIG. 3 , is formed in the center of the signal extractionunit 65-1. Then, the N+ semiconductor region 201-1 is surrounded by arectangular P+ semiconductor region 202-1, more specifically, arectangular frame-like P+ semiconductor region 202-1, corresponding tothe P+ semiconductor region 73-1 illustrated in FIG. 3 . That is, the P+semiconductor region 202-1 is formed to surround the N+ semiconductorregion 201-1.

Similarly, in the signal extraction unit 65-2, a rectangular N+semiconductor region 201-2 corresponding to the N+ semiconductor region71-2 illustrated in FIG. 3 , is formed in the center of the signalextraction unit 65-2. Then, the N+ semiconductor region 201-2 issurrounded by a rectangular P+ semiconductor region 202-2, morespecifically, a rectangular frame-like P+ semiconductor region 202-2,corresponding to the P+ semiconductor region 73-2 illustrated in FIG. 3.

Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the N+ semiconductor region 201-1 from the N+semiconductor region 201-2, the N+ semiconductor region 201-1 and the N+semiconductor region 201-2 will also be simply referred to as an N+semiconductor region 201. In addition, hereinafter, in a case where itis not necessary to particularly discriminate the P+ semiconductorregion 202-1 from the P+ semiconductor region 202-2, the P+semiconductor region 202-1 and the P+ semiconductor region 202-2 willalso be simply referred to as a P+ semiconductor region 202.

Even in a case where the signal extraction unit 65 has a configurationillustrated in FIG. 12 , as with the case of the configurationillustrated in FIG. 3 , the N+ semiconductor region 201 functions as thecharge detection unit for detecting the amount of signal carrier, andthe P+ semiconductor region 202 functions as the voltage applicationunit for generating the electrical field by directly applying a voltageto the substrate 61.

Modification Example 1 of Second Embodiment

<Configuration Example of Pixel>

In addition, as with the example illustrated in FIG. 9 , even in thecase of arrangement in which the N+ semiconductor region 201 issurrounded by the P+ semiconductor region 202, the shape of the N+semiconductor region 201 and the P+ semiconductor region 202 may be anyshape.

That is, for example, as illustrated in FIG. 13 , the N+ semiconductorregion 201 and the P+ semiconductor region 202 may be in the shape of acircle. Furthermore, in FIG. 13 , the same reference numerals will beapplied to portions corresponding to those in FIG. 12 , and thedescription thereof will be suitably omitted.

FIG. 13 illustrates the N+ semiconductor region 201 and the P+semiconductor region 202 when the portion of the signal extraction unit65 in the pixel 51 is seen from the direction vertical to the substrate61.

In this example, the oxide film 64 (not illustrated) is formed in thecentral portion of the pixel 51, and the signal extraction unit 65 isformed in the portion slightly on the end side from the center of thepixel 51. In particular, here, two signal extraction units 65 are formedin the pixel 51.

Then, in each of the signal extraction units 65, a circular N+semiconductor region 201 is formed in the center position, and the N+semiconductor region 201 is surrounded by a circular P+ semiconductorregion 202, more specifically, an annular P+ semiconductor region 202,around the N+ semiconductor region 201.

Third Embodiment

<Configuration Example of Pixel>

Further, the N+ semiconductor region and the P+ semiconductor regionformed in the signal extraction unit 65, may be formed into the shape ofa line (a rectangle).

In such a case, for example, the pixel 51 is configured as illustratedin FIG. 14 . Furthermore, in FIG. 14 , the same reference numerals willbe applied to portions corresponding to those in FIG. 3 , and thedescription thereof will be suitably omitted.

FIG. 14 illustrates the arrangement of the N+ semiconductor region andthe P+ semiconductor region when the portion of the signal extractionunit 65 in the pixel 51 is seen from the direction vertical to thesubstrate 61.

In this example, the oxide film 64 (not illustrated) is formed in thecentral portion of the pixel 51, the signal extraction unit 65-1 isformed in the portion slightly on the upper side in the drawings fromthe center of the pixel 51, and the signal extraction unit 65-2 isformed in the portion slightly on the lower side in the drawings fromthe center of the pixel 51. In particular, in this example, theformation position of the signal extraction unit 65 in the pixel 51 isthe same position as that in FIG. 3 .

In the signal extraction unit 65-1, a linear P+ semiconductor region 231corresponding to the P+ semiconductor region 73-1 illustrated in FIG. 3, is formed in the center of the signal extraction unit 65-1. Then, alinear N+ semiconductor region 232-1 and a linear N+ semiconductorregion 232-2, corresponding to the N+ semiconductor region 71-1illustrated in FIG. 3 , are formed around the P+ semiconductor region231 such that the P+ semiconductor region 231 is interposed between theN+ semiconductor region 232-1 and the N+ semiconductor region 232-2.That is, the P+ semiconductor region 231 is formed in a positioninterposed between the N+ semiconductor region 232-1 and the N+semiconductor region 232-2.

Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the N+ semiconductor region 232-1 from the N+semiconductor region 232-2, the N+ semiconductor region 232-1 and the N+semiconductor region 232-2 will also be simply referred to as an N+semiconductor region 232.

In the example illustrated in FIG. 3 , the P+ semiconductor region 73 issurrounded by the N+ semiconductor region 71, but in an exampleillustrated in FIG. 14 , the P+ semiconductor region 231 is interposedbetween two N+ semiconductor regions 232 that are provided adjacent toeach other.

Similarly, in the signal extraction unit 65-2, a linear P+ semiconductorregion 233 corresponding to the P+ semiconductor region 73-2 illustratedin FIG. 3 , is formed in the center of the signal extraction unit 65-2.Then, a linear N+ semiconductor region 234-1 and a linear N+semiconductor region 234-2, corresponding to the N+ semiconductor region71-2 illustrated in FIG. 3 , are formed around the P+ semiconductorregion 233 such that the P+ semiconductor region 233 is interposedbetween the N+ semiconductor region 234-1 and the N+ semiconductorregion 234-2.

Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the N+ semiconductor region 234-1 from the N+semiconductor region 234-2, the N+ semiconductor region 234-1 and the N+semiconductor region 234-2 will also be simply referred to as an N+semiconductor region 234.

In the signal extraction unit 65 in FIG. 14 , the P+ semiconductorregion 231 and the P+ semiconductor region 233 function as the voltageapplication unit corresponding to the P+ semiconductor region 73illustrated in FIG. 3 , and the N+ semiconductor region 232 and the N+semiconductor region 234 function as the charge detection unitcorresponding to the N+ semiconductor region 71 illustrated in FIG. 3 .In this case, for example, both of the N+ semiconductor region 232-1 andthe N+ semiconductor region 232-2 are connected to the FD portion A.

In addition, in the drawings, the length of each of the linear P+semiconductor region 231, the linear N+ semiconductor region 232, thelinear P+ semiconductor region 233, and the linear N+ semiconductorregion 234, in the horizontal direction, may be any length, and each ofthe regions may not have the same length.

Fourth Embodiment

<Configuration Example of Pixel>

Further, in the example illustrated in FIG. 14 , a structure in whichthe P+ semiconductor region 231 or the P+ semiconductor region 233 isinterposed between the N+ semiconductor regions 232 or the N+semiconductor regions 234, has been described as an example, but on thecontrary, the N+ semiconductor region may be interposed between the P+semiconductor regions.

In such a case, for example, the pixel 51 is configured as illustratedin FIG. 15 . Furthermore, in FIG. 15 , the same reference numerals willbe applied to portions corresponding to those in FIG. 3 , and thedescription thereof will be suitably omitted.

FIG. 15 illustrates the arrangement of the N+ semiconductor region andthe P+ semiconductor region when the portion of the signal extractionunit 65 in the pixel 51 is seen from the direction vertical to thesubstrate 61.

In this example, the oxide film 64 (not illustrated) is formed in thecentral portion of the pixel 51, and the signal extraction unit 65 isformed in the portion slightly on the end side from the center of thepixel 51. Particularly in this example, the formation position of eachof two signal extraction units 65 in the pixel 51 is the same positionas that in FIG. 3 .

In the signal extraction unit 65-1, the linear N+ semiconductor region261 corresponding to the N+ semiconductor region 71-1 illustrated inFIG. 3 , is formed in the center of the signal extraction unit 65-1.Then, a linear P+ semiconductor region 262-1 and a linear P+semiconductor region 262-2, corresponding to the P+ semiconductor region73-1 illustrated in FIG. 3 , are formed around the N+ semiconductorregion 261 such that the N+ semiconductor region 261 is interposedbetween the P+ semiconductor region 262-1 and the P+ semiconductorregion 262-2. That is, the N+ semiconductor region 261 is formed in aposition interposed by the P+ semiconductor region 262-1 and the P+semiconductor region 262-2.

Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the P+ semiconductor region 262-1 from the P+semiconductor region 262-2, the P+ semiconductor region 262-1 and the P+semiconductor region 262-2 will also be simply referred to as a P+semiconductor region 262.

Similarly, in the signal extraction unit 65-2, a linear N+ semiconductorregion 263 corresponding to the N+ semiconductor region 71-2 illustratedin FIG. 3 , is formed in the center of the signal extraction unit 65-2.Then, a linear P+ semiconductor region 264-1 and a linear P+semiconductor region 264-2, corresponding to the P+ semiconductor region73-2 illustrated in FIG. 3 , are formed around the N+ semiconductorregion 263 such that the N+ semiconductor region 263 is interposedbetween the P+ semiconductor region 264-1 and the P+ semiconductorregion 264-2.

Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the P+ semiconductor region 264-1 from the P+semiconductor region 264-2, the P+ semiconductor region 264-1 and the P+semiconductor region 264-2 will also be simply referred to as a P+semiconductor region 264.

In the signal extraction unit 65 in FIG. 15 , the P+ semiconductorregion 262 and the P+ semiconductor region 264 function as the voltageapplication unit corresponding to the P+ semiconductor region 73illustrated in FIG. 3 , and the N+ semiconductor region 261 and the N+semiconductor region 263 function as the charge detection unitcorresponding to the N+ semiconductor region 71 illustrated in FIG. 3 .Furthermore, in the drawings, the length of each of the linear N+semiconductor region 261, the linear P+ semiconductor region 262, thelinear N+ semiconductor region 263, and the linear P+ semiconductorregion 264, in the horizontal direction, may be any length, and each ofthe regions may not have the same length.

Fifth Embodiment

<Configuration Example of Pixel>

Further, in the above description, an example in which each of twosignal extraction units 65 is provided in each of the pixels configuringthe pixel array portion 21, has been described, but the number of signalextraction units to be provided in the pixel, may be one, or may bethree or more.

For example, in a case where one signal extraction unit is formed in thepixel, a pixel portion, for example, is configured as illustrated inFIG. 16 . Furthermore, in FIG. 16 , the same reference numerals will beapplied to portions corresponding to those in FIG. 3 , and thedescription thereof will be suitably omitted.

FIG. 16 illustrates the arrangement of the N+ semiconductor region andthe P+ semiconductor region when the portion of the signal extractionunit in a part of the pixels provided in the pixel array portion 21, isseen from the direction vertical to the substrate.

In this example, the pixel 51 provided in the pixel array portion 21, apixel 291-1 to a pixel 291-3 adjacent to the pixel 51, are illustrated,and one signal extraction unit is formed in each of the pixels.

That is, in the pixel 51, one signal extraction unit 65 is formed in thecentral portion of the pixel 51. Then, in the signal extraction unit 65,a circular P+ semiconductor region 301 is formed in the center position,and the P+ semiconductor region 301 is surrounded by a circular N+semiconductor region 302, more specifically, an annular N+ semiconductorregion 302, around the P+ semiconductor region 301.

Here, the P+ semiconductor region 301 corresponds to the P+semiconductor region 73 illustrated in FIG. 3 , and functions as thevoltage application unit. In addition, the N+ semiconductor region 302corresponds to the N+ semiconductor region 71 illustrated in FIG. 3 ,and functions as the charge detection unit. Furthermore, the P+semiconductor region 301 or the N+ semiconductor region 302 may be inany shape.

In addition, the pixel 291-1 to the pixel 291-3 around the pixel 51,have a structure similar to that of the pixel 51.

That is, for example, one signal extraction unit 303 is formed in thecentral portion of the pixel 291-1. Then, in the signal extraction unit303, a circular P+ semiconductor region 304 is formed in the centerposition, and the P+ semiconductor region 304 is surrounded by acircular N+ semiconductor region 305, more specifically, an annular N+semiconductor region 305, around the P+ semiconductor region 304.

The P+ semiconductor region 304 and the N+ semiconductor region 305correspond to the P+ semiconductor region 301 and the N+ semiconductorregion 302, respectively.

Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the pixel 291-1 to the pixel 291-3 from eachother, the pixel 291-1 to the pixel 291-3 will also be simply referredto as a pixel 291.

Thus, in a case where one signal extraction unit (tap) is formed in eachof the pixels, several pixels adjacent to each other are used at thetime of measuring the distance to the target by the indirect ToF method,and the distance information is calculated on the basis of pixel signalobtained with respect to the pixels.

For example, focusing on the pixel 51, in a state where the signalextraction unit 65 of the pixel 51 is the active tap, for example, eachof the pixels is driven such that the signal extraction unit 303 ofseveral pixels 291 adjacent to the pixel 51, including the pixel 291-1,becomes the inactive tap.

As an example, for example, the pixel 291-1, the pixel 291-3, or thelike, is driven such that the signal extraction unit of the pixelsadjacent to the pixel 51 on the left, right, top, and bottom, in thedrawings, becomes the inactive tap.

After that, in a case where a voltage to be applied is switched suchthat the signal extraction unit 65 of the pixel 51 becomes the inactivetap, at this time, the signal extraction unit 303 of the several pixels291 adjacent to the pixel 51, including the pixel 291-1, becomes theactive tap.

Then, the distance information is calculated on the basis of the pixelsignal read out from the signal extraction unit 65 in a state where thesignal extraction unit 65 is the active tap, and the pixel signal readout from the signal extraction unit 303 in a state where the signalextraction unit 303 is the active tap.

Thus, even in a case where the number of signal extraction units (taps)provided in the pixel is one, it is possible to measure the distance byusing the pixels adjacent to each other according to the indirect ToFmethod.

Sixth Embodiment

<Configuration Example of Pixel>

In addition, as described above, three or more signal extraction units(taps) may be provided in each of the pixels.

For example, in a case where four signal extraction units (taps) areprovided in the pixel, each of the pixels of the pixel array portion 21is configured as illustrated in FIG. 17 . Furthermore, in FIG. 17 , thesame reference numerals will be applied to portions corresponding tothose in FIG. 16 , and the description thereof will be suitably omitted.

FIG. 17 illustrates the arrangement of the N+ semiconductor region andthe P+ semiconductor region when the portion of the signal extractionunit in a part of the pixels provided in the pixel array portion 21 isseen from the direction vertical to the substrate.

A sectional view of line C-C′, illustrated in FIG. 17 , is FIG. 36 asdescribed later.

In this example, the pixel 51 and the pixel 291 provided in the pixelarray portion 21, are illustrated, and four signal extraction units areformed in each of the pixels.

That is, in the pixel 51, a signal extraction unit 331-1, a signalextraction unit 331-2, a signal extraction unit 331-3, and a signalextraction unit 331-4 are formed in a position between the center of thepixel 51 and the end portion of the pixel 51, that is, a position on alower left side in the center of the pixel 51 in the drawings, aposition on an upper left side, a position on an upper right side, and aposition on a lower right side.

The signal extraction unit 331-1 to the signal extraction unit 331-4correspond to the signal extraction unit 65 illustrated in FIG. 16 .

For example, in the signal extraction unit 331-1, a circular P+semiconductor region 341 is formed in the center position, and the P+semiconductor region 341 is surrounded by a circular N+ semiconductorregion 342, more specifically, an annular N+ semiconductor region 342,around the P+ semiconductor region 341.

Here, the P+ semiconductor region 341 corresponds to the P+semiconductor region 301 illustrated in FIG. 16 , and functions as thevoltage application unit. In addition, the N+ semiconductor region 342corresponds to the N+ semiconductor region 302 illustrated in FIG. 16 ,and functions as the charge detection unit. Furthermore, the P+semiconductor region 341 or the N+ semiconductor region 342 may be inany shape.

In addition, the signal extraction unit 331-2 to the signal extractionunit 331-4 also have a configuration similar to that of the signalextraction unit 331-1, and respectively include the P+ semiconductorregion functioning as the voltage application unit, and the N+semiconductor region functioning as the charge detection unit. Further,the pixel 291 formed around the pixel 51, has a structure similar tothat of the pixel 51.

Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the signal extraction unit 331-1 to the signalextraction unit 331-4 from each other, the signal extraction unit 331-1to the signal extraction unit 331-4 will be also simply referred to as asignal extraction unit 331.

Thus, in a case where four signal extraction units are provided in eachof the pixels, for example, the distance information is calculated byusing four signal extraction units in the pixel, at the time ofmeasuring the distance according to the indirect ToF method.

As an example, focusing on the pixel 51, for example, in a state wherethe signal extraction unit 331-1 and the signal extraction unit 331-3are the active tap, the pixel 51 is driven such that the signalextraction unit 331-2 and the signal extraction unit 331-4 become theinactive tap.

After that, a voltage to be applied to each of the signal extractionunits 331, is switched. That is, the pixel 51 is driven such that thesignal extraction unit 331-1 and the signal extraction unit 331-3 becomethe inactive tap, and the signal extraction unit 331-2 and the signalextraction unit 331-4 become the active tap.

Then, the distance information is calculated on the basis of the pixelsignal read out from the signal extraction unit 331-1 and the signalextraction unit 331-3 in a state where the signal extraction unit 331-1and the signal extraction unit 331-3 are the active tap, the pixelsignal read out from the signal extraction unit 331-2 and the signalextraction unit 331-4 in a state where the signal extraction unit 331-2and the signal extraction unit 331-4 are the active tap.

Seventh Embodiment

<Configuration Example of Pixel>

Further, the signal extraction unit (the tap) may be shared between thepixels adjacent to each other in the pixel array portion 21.

In such a case, each of the pixels of the pixel array portion 21, forexample, is configured as illustrated in FIG. 18 . Furthermore, in FIG.18 , the same reference numerals will be applied to portionscorresponding to those in FIG. 16 , and the description thereof will besuitably omitted.

FIG. 18 illustrates the arrangement of the N+ semiconductor region andthe P+ semiconductor region when the portion of the signal extractionunit in a part of the pixels provided in the pixel array portion 21 isseen from the direction vertical to the substrate.

In this example, the pixel 51 and the pixel 291 provided in the pixelarray portion 21, are illustrated, and two signal extraction units areformed in each of the pixels.

For example, in the pixel 51, a signal extraction unit 371 is formed inthe end portion of the pixel 51 on an upper side, in the drawings, and asignal extraction unit 372 is formed in the end portion of the pixel 51on a lower side, in the drawings.

The signal extraction unit 371 is shared between the pixel 51 and thepixel 291-1. That is, the signal extraction unit 371 is used as the tapof the pixel 51, and is also used as the tap of the pixel 291-1. Inaddition, the signal extraction unit 372 is shared between the pixel 51and a pixel (not illustrated) adjacent to the pixel 51 on a lower side,in the drawings.

In the signal extraction unit 371, a linear P+ semiconductor region 381corresponding to the P+ semiconductor region 231 illustrated in FIG. 14, is formed in the center position. Then, in the drawings, a linear N+semiconductor region 382-1 and a linear N+ semiconductor region 382-2,corresponding to the N+ semiconductor region 232 illustrated in FIG. 14, are formed such that the P+ semiconductor region 381 is interposedbetween the N+ semiconductor region 382-1 and the N+ semiconductorregion 382-2, in an upper position and a lower position of the P+semiconductor region 381.

In particular, in this example, the P+ semiconductor region 381 isformed in a boundary portion between the pixel 51 and the pixel 291-1.In addition, the N+ semiconductor region 382-1 is formed in the regionin the pixel 51, and the N+ semiconductor region 382-2 is formed in theregion in the pixel 291-1.

Here, the P+ semiconductor region 381 functions as the voltageapplication unit, and the N+ semiconductor region 382-1 and the N+semiconductor region 382-2 function as the charge detection unit.Furthermore, hereinafter, in a case where it is not necessary toparticularly discriminate the N+ semiconductor region 382-1 from the N+semiconductor region 382-2, the N+ semiconductor region 382-1 and the N+semiconductor region 382-2 will be also simply referred to as an N+semiconductor region 382.

In addition, the P+ semiconductor region 381 or the N+ semiconductorregion 382 may be in any shape. Further, the N+ semiconductor region382-1 and the N+ semiconductor region 382-2 maybe connected to the sameFD portion, or may be connected to FD portions different from eachother.

In the signal extraction unit 372, a linear P+ semiconductor region 383,an N+ semiconductor region 384-1, and an N+ semiconductor region 384-2are formed.

The P+ semiconductor region 383, the N+ semiconductor region 384-1, andthe N+ semiconductor region 384-2 respectively correspond to the P+semiconductor region 381, the N+ semiconductor region 382-1, and the N+semiconductor region 382-2, and have similar arrangement, a similarshape, and a similar function. Furthermore, hereinafter, in a case whereit is not necessary to particularly discriminate the N+ semiconductorregion 384-1 from the N+ semiconductor region 384-2, the N+semiconductor region 384-1 and the N+ semiconductor region 384-2 willalso be simply referred to as an N+ semiconductor region 384.

As described above, even in a case where the signal extraction unit (thetap) is shared between the adjacent pixels, it is possible to measurethe distance by the indirect ToF method, according to an operationsimilar to that of the example illustrated in FIG. 3 .

As illustrated in FIG. 18 , in a case where the signal extraction unitis shared between the pixels, for example, a distance between a pair ofP+ semiconductor regions for generating an electrical field, that is, acurrent, such as a distance between the P+ semiconductor region 381 andthe P+ semiconductor region 383, becomes long. In other words, thesignal extraction unit is shared between the pixels, and thus, it ispossible to maximize the distance between the P+ semiconductor regions.

With this arrangement, it is difficult for a current to flow between theP+ semiconductor regions, and thus, it is possible to reduce the powerconsumption of the pixel, and it is also advantageous to theminiaturization of the pixel.

Furthermore, here, an example in which one signal extraction unit isshared between two pixels adjacent to each other, has been described,but one signal extraction unit may be shared in three or more pixelsadjacent to each other. In addition, in a case where the signalextraction unit is shared in two or more pixels adjacent to each other,in the signal extraction units, only the charge detection unit fordetecting the signal carrier may be shared, or only the voltageapplication unit for generating the electrical field may be shared.

Eighth Embodiment

<Configuration Example of Pixel>

Further, the on-chip lens or the inter-pixel light shielding unit,provided in each of the pixels such as the pixel 51 of the pixel arrayportion 21, may not be particularly provided.

Specifically, for example, the pixel 51 can be configured as illustratedin FIG. 19 . Furthermore, In FIG. 19 , the same reference numerals willbe applied to portions corresponding to those in FIG. 2 , and thedescription thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 19 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thatthe on-chip lens 62 is not provided.

In the pixel 51 illustrated in FIG. 19 , the on-chip lens 62 is notprovided on the incidence surface side of the substrate 61, and thus, itis possible to further reduce the attenuation of the infrared light tobe incident on the substrate 61 from the outside. With this arrangement,the amount of infrared light that can be received by the substrate 61,increases, and the sensitivity of the pixel 51 can be improved.

Modification Example 1 of Eighth Embodiment

<Configuration Example of Pixel>

In addition, the configuration of the pixel 51, for example, may be aconfiguration illustrated in FIG. 20 . Furthermore, in FIG. 20 , thesame reference numerals will be applied to portions corresponding tothose in FIG. 2 , and the description thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 20 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thatthe inter-pixel light shielding unit 63-1 and the inter-pixel lightshielding unit 63-2 are not provided.

In an example illustrated in FIG. 20 , the inter-pixel light shieldingunit 63 is not provided on the incidence surface side of the substrate61, and thus, the effect of suppressing the color mixture decreases, butthe infrared light that is shielded by the inter-pixel light shieldingunit 63, is also incident on the substrate 61, and therefore, thesensitivity of the pixel 51 can be improved.

Furthermore, it is obvious that neither the on-chip lens 62 nor theinter-pixel light shielding unit 63 may be provided in the pixel 51.

Modification Example 2 of Eighth Embodiment

<Configuration Example of Pixel>

In addition, for example, as illustrated in FIG. 21 , the thickness ofthe on-chip lens in a light axis direction may be optimized.Furthermore, in FIG. 21 , the same reference numerals will be applied toportions corresponding to those in FIG. 2 , and the description thereofwill be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 21 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thatan on-chip lens 411 is provided instead of the on-chip lens 62.

In the pixel 51 illustrated in FIG. 21 , the on-chip lens 411 is formedon the incidence surface side of the substrate 61, that is, in thedrawings, an upper side. The thickness of the on-chip lens 411 in thelight axis direction, that is, in the drawings, the thickness of theon-chip lens 411 in the vertical direction, is thin, compared to theon-chip lens 62 illustrated in FIG. 2 .

In general, it is advantageous to the condensing of light to be incidenton the on-chip lens, as the on-chip lens provided on the front surfaceof the substrate 61, becomes thicker. However, the on-chip lens 411becomes thin, and thus, a transmissivity becomes high, and thesensitivity of the pixel 51 can be improved, and therefore, it issufficient to suitably set the thickness of the on-chip lens 411,according to the thickness of the substrate 61, a position on whichinfrared light is to be condensed, or the like.

Ninth Embodiment

<Configuration Example of Pixel>

Further, a separation region for improving separation characteristicsbetween the adjacent pixels, and for suppressing the color mixture, maybe provided between the pixel and the pixel, formed in the pixel arrayportion 21.

In such a case, the pixel 51, for example, is configured as illustratedin FIG. 22 . Furthermore, in FIG. 22 , the same reference numerals willbe applied to portions corresponding to those in FIG. 2 , and thedescription thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 22 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thata separation region 441-1 and a separation region 441-2 are provided inthe substrate 61.

In the pixel 51 illustrated in FIG. 22 , the separation region 441-1 andthe separation region 441-2, penetrating through at least a part of thesubstrate 61, are formed in a boundary portion between the pixel 51 andthe other pixel adjacent to the pixel 51 in the substrate 61, that is,in the drawings, right and left end portions of the pixel 51, by a lightshielding film or the like. Furthermore, hereinafter, in a case where itis not necessary to particularly discriminate the separation region441-1 from the separation region 441-2, the separation region 441-1 andthe separation region 441-2 will also be simply referred to as aseparation region 441.

For example, when the separation region 441 is formed, a longitudinalgroove (trench) is formed in a downward direction (in a directionvertical to the surface of the substrate 61) in the drawings, from theincidence surface side of the substrate 61, that is, the surface of thesubstrate 61 on an upper side in the drawings, and the light shieldingfilm is formed by being embedded in the groove portion, and thus, theseparation region 441 is formed. The separation region 441 functions asa pixel separation region configured to shield infrared light that isincident on the substrate 61 from the incidence surface, and is directedtowards the other pixel adjacent to the pixel 51.

The embedded separation region 441 is formed as described above, andthus, it is possible to improve the separation characteristics of theinfrared light between the pixels, and to suppress the occurrence of thecolor mixture.

Modification Example 1 of Ninth Embodiment

<Configuration Example of Pixel>

Further, in a case where the embedded separation region is formed in thepixel 51, for example, as illustrated in FIG. 23 , a separation region471-1 and a separation region 471-2, penetrating through the entiresubstrate 61, may be provided. Furthermore, in FIG. 23 , the samereference numerals will be applied to portions corresponding to those inFIG. 2 , and the description thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 23 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thatthe separation region 471-1 and the separation region 471-2 are providedin the substrate 61. That is, in the pixel 51 illustrated in FIG. 23 ,the separation region 471-1 and the separation region 471-2 are providedinstead of the separation region 441 of the pixel 51 illustrated in FIG.22 .

In the pixel 51 illustrated in FIG. 23 , the separation region 471-1 andthe separation region 471-2, penetrating through the entire substrate61, are formed in the boundary portion between the pixel 51 and theother pixel adjacent to the pixel 51 in the substrate 61, that is, inthe drawings, the right and left end portions of the pixel 51, by thelight shielding film or the like. Furthermore, hereinafter, in a casewhere it is not necessary to particularly discriminate the separationregion 471-1 from the separation region 471-2, the separation region471-1 and the separation region 471-2 will also be simply referred to asa separation region 471.

For example, when the separation region 471 is formed, a longitudinalgroove (trench) is formed in an upward direction in the drawings, fromthe surface of the substrate 61 on a side opposite to the incidencesurface side, that is, the surface of the substrate 61 on a lower sidein the drawings. At this time, such a groove is formed to reach theincidence surface of the substrate 61, that is, to penetrate through thesubstrate 61. Then, the light shielding film is formed by being embeddedin the groove portion formed as described above, and thus, theseparation region 471 is formed.

According to the embedded separation region 471, it is possible toimprove the separation characteristics of the infrared light between thepixels, and to suppress the occurrence of the color mixture.

Tenth Embodiment

<Configuration Example of Pixel>

Further, the thickness of the substrate on which the signal extractionunit 65 is formed, can be set according to various characteristics ofthe pixel, or the like.

Therefore, for example, as illustrated in FIG. 24 , a substrate 501configuring the pixel 51, can be thicker than the substrate 61illustrated in FIG. 2 . Furthermore, in FIG. 24 , the same referencenumerals will be applied to portions corresponding to those in FIG. 2 ,and the description thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 24 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thatthe substrate 501 is provided instead of the substrate 61.

That is, in the pixel 51 illustrated in FIG. 24 , the on-chip lens 62and the inter-pixel light shielding unit 63 are formed on an incidencesurface side of the substrate 501. In addition, the oxide film 64, thesignal extraction unit 65, and the separation portion 75 are formed inthe vicinity of a front surface of the substrate 501 on a side oppositeto the incidence surface side.

The substrate 501, for example, includes a P type semiconductorsubstrate having a thickness of greater than or equal to 20 μm, thesubstrate 501 and the substrate 61 are different from each other only inthe thickness of the substrate, and a position in which the oxide film64, the signal extraction unit 65, and the separation portion 75 areformed, is the same position between the substrate 501 and the substrate61.

Furthermore, film thicknesses or the like of various layers (films) tobe suitably formed on the incidence surface side or the like of thesubstrate 501 or the substrate 61 may be optimized according to thecharacteristics of the pixel 51, or the like.

Eleventh Embodiment

<Configuration Example of Pixel>

Further, in the above description, an example in which the substrateconfiguring the pixel 51 includes the P type semiconductor substrate,has been described, but for example, as illustrated in FIG. 25 , thesubstrate may include an N type semiconductor substrate. Furthermore, inFIG. 25 , the same reference numerals will be applied to portionscorresponding to those in FIG. 2 , and the description thereof will besuitably omitted.

The configuration of the pixel 51 illustrated in FIG. 25 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thata substrate 531 is provided instead of the substrate 61.

In the pixel 51 illustrated in FIG. 25 , for example, the on-chip lens62 and the inter-pixel light shielding unit 63 are formed on anincidence surface side of the substrate 531 that is a silicon substrate,that is, an N type semiconductor substrate including an N typesemiconductor region.

In addition, the oxide film 64, the signal extraction unit 65, and theseparation portion 75 are formed in the vicinity of a front surface ofthe substrate 531 on a side opposite to the incidence surface side. Aposition in which the oxide film 64, the signal extraction unit 65, andthe separation portion 75 are formed, is the same position between thesubstrate 531 and the substrate 61, and the configuration of the signalextraction unit 65 is the same as that of the substrate 531 and thesubstrate 61.

The thickness of the substrate 531, for example, in the verticaldirection in the drawings, that is, thickness of the substrate 531 in adirection vertical to the surface of the substrate 531, is less than orequal to 20 μm.

In addition, the substrate 531, for example, includes an N-Epi substratehaving high resistance, of which a substrate concentration is less thanor equal to 1E+13 order, or the like, and the resistance (a resistivity)of the substrate 531, for example, is greater than or equal to 500[Ωcm]. With this arrangement, it is possible to reduce the powerconsumption of the pixel 51.

Here, in a relationship between the substrate concentration and theresistance of the substrate 531, for example, the resistance is 2000[Ωcm] when the substrate concentration is 2.15E+12 [cm³], the resistanceis 1000 [Ωcm] when the substrate concentration is 4.30E+12 [cm³], theresistance is 500 [Ωcm] when the substrate concentration is 8.61E+12[cm³], the resistance is 100 [Ωcm] when the substrate concentration is4.32E+13 [cm³], and the like.

Thus, even in a case where the substrate 531 of the pixel 51 isconfigured as the N type semiconductor substrate, a similar effect canbe obtained according to an operation similar to that of the exampleillustrated in FIG. 2 .

Twelfth Embodiment

<Configuration Example of Pixel>

Further, as with an example described with reference to FIG. 24 , thethickness of the N type semiconductor substrate can also be setaccording to various characteristics of the pixel, or the like.

Therefore, for example, as illustrated in FIG. 26 , a substrate 561configuring the pixel 51, can be thicker than the substrate 531illustrated in FIG. 25 . Furthermore, in FIG. 26 , the same referencenumerals will be applied to portions corresponding to those in FIG. 25 ,and the description thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 26 , is the sameas the configuration of the pixel 51 illustrated in FIG. 25 , exceptthat the substrate 561 is provided instead of the substrate 531.

That is, in the pixel 51 illustrated in FIG. 26 , the on-chip lens 62and the inter-pixel light shielding unit 63 are formed on an incidencesurface side of the substrate 561. In addition, the oxide film 64, thesignal extraction unit 65, and the separation portion 75 are formed inthe vicinity of a front surface of the substrate 561 on a side oppositeto the incidence surface side.

The substrate 561, for example, includes an N type semiconductorsubstrate having a thickness of greater than or equal to 20 μm, thesubstrate 561 and the substrate 531 are different from each other onlyin the thickness of the substrate, and a position in which the oxidefilm 64, the signal extraction unit 65, and the separation portion 75are formed, is the same position between the substrate 561 and thesubstrate 531.

Thirteenth Embodiment

<Configuration Example of Pixel>

In addition, for example, a bias is applied to the incidence surfaceside of the substrate 61, and thus, in the substrate 61, the electricalfield in the direction vertical to the surface of the substrate 61(hereinafter, also referred to as a Z direction) may be enhanced.

In such a case, for example, the pixel 51 is configured as illustratedin FIG. 27 . Furthermore, in FIG. 27 , the same reference numerals willbe applied to portions corresponding to those in FIG. 2 , and thedescription thereof will be suitably omitted.

In FIG. 27 , the pixel 51 illustrated in FIG. 2 , is illustrated in aportion illustrated by an arrow W61, and an arrow in the substrate 61 ofthe pixel 51 indicates the strength of the electrical field in the Zdirection, in the substrate 61.

In contrast, the configuration of the pixel 51 in the case of applying abias (a voltage) to the incidence surface, is illustrated in a portionillustrated by an arrow W62. The configuration of the pixel 51illustrated by the arrow W62 is basically the same as the configurationof the pixel 51 illustrated in FIG. 2 , but includes a configuration ofapplying a voltage to the incidence surface side of the substrate 61. Inaddition, an arrow in the substrate 61 of the pixel 51 indicates thestrength of the electrical field in the Z direction, that is, thestrength of a bias to be applied, in the substrate 61.

In the example illustrated by the arrow W62, a P+ semiconductor region601 is formed immediately below the incidence surface of the substrate61, that is, in the drawings, the surface of the substrate 61 on anupper side.

For example, a film having a positive fixed charge, is laminated, and isset to the P+ semiconductor region 601 cover the entire incidencesurface, and the incidence surface side of the substrate 61 is set in ahole accumulation state, and thus, the occurrence of a dark current issuppressed. Furthermore, it is obvious that the P+ semiconductor region601 is also formed in the substrate 61 illustrated in FIG. 2 .

Here, a bias is applied by applying a voltage of less than or equal to 0V to the P+ semiconductor region 601 in the pixel array or from theoutside, and thus, the electrical field in the Z direction is enhanced.That is, it is known that the thickness of the arrow illustrated in thesubstrate 61 is also greater than that of the example of the arrow W61,and the electrical field in the Z direction becomes stronger. Thus, avoltage is applied to the incidence surface side of the substrate 61,that is, the P+ semiconductor region 601, and thus, the electrical fieldin the Z direction is enhanced, and the extraction efficiency of theelectron in the signal extraction unit 65 can be improved.

Furthermore, a configuration for applying a voltage to the incidencesurface side of the substrate 61, is not limited to a configuration inwhich the P+ semiconductor region 601 is provided, and may be any otherconfigurations. For example, a transparent electrode film is formedbetween the incidence surface of the substrate 61 and the on-chip lens62 by being laminated, and a voltage is applied to the transparentelectrode film, and thus, a bias may be applied.

Fourteenth Embodiment

<Configuration Example of Pixel>

Further, in order to improve the sensitivity of the pixel 51 withrespect to an infrared ray, a reflection member having a large area, maybe provided on the surface of the substrate 61 on a side opposite to theincidence surface.

In such a case, the pixel 51, for example, is configured as illustratedin FIG. 28 . Furthermore, in FIG. 28 , the same reference numerals willbe applied to portions corresponding to those in FIG. 2 , and thedescription thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 28 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thata reflection member 631 is provided on the surface of the substrate 61on a side opposite to the incidence surface.

In an example illustrated in FIG. 28 , the reflection member 631 onwhich infrared light is reflected, is provided to cover the entiresurface of the substrate 61 on a side opposite to the incidence surface.

The reflection member 631 may be any reflection member insofar as havinga high reflection rate of infrared light. For example, a metal such ascopper or aluminum, provided in a multi-layer wiring layer laminated onthe surface of the substrate 61 on a side opposite to the incidencesurface, may be used as the reflection member 631, or a reflectionstructure such as polysilicon or an oxide film, may be formed on thesurface of the substrate 61 on a side opposite to the incidence surface,and may be used as the reflection member 631.

Thus, the reflection member 631 is provided in the pixel 51, and thus,infrared light that is incident on the substrate 61 from the incidencesurface through the on-chip lens 62, and is transmitted through thesubstrate 61 without being subjected to the photoelectric conversion inthe substrate 61, can be incident again on the substrate 61 by beingreflected on the reflection member 631. With this arrangement, theamount of infrared light to be subjected to the photoelectric conversionin the substrate 61, increases, and thus, a quantum efficiency (QE),that is, the sensitivity of the pixel 51 with respect to the infraredlight can be improved.

Fifteenth Embodiment

<Configuration Example of Pixel>

Further, a P well region including a P type semiconductor region, may beprovided instead of the oxide film 64 in the substrate 61 of the pixel51.

In such a case, the pixel 51, for example, is configured as illustratedin FIG. 29 . Furthermore, in FIG. 29 , the same reference numerals willbe applied to portions corresponding to those in FIG. 2 , and thedescription thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 29 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thata P well region 671, a separation portion 672-1, and a separationportion 672-2 are provided instead of the oxide film 64.

In an example illustrated in FIG. 29 , the P well region 671 including aP type semiconductor region, is formed in the central portion on asurface side opposite to the incidence surface in the substrate 61, thatis, in the drawings, on an inner side of a surface on a lower side. Inaddition, the separation portion 672-1 for separating the P well region671 from the N+ semiconductor region 71-1, is formed between the P wellregion 671 and the N+ semiconductor region 71-1, by an oxide film or thelike. Similarly, the separation portion 672-2 for separating the P wellregion 671 from the N+ semiconductor region 71-2, is formed between theP well region 671 and the N+ semiconductor region 71-2, by an oxide filmor the like. In the pixel 51 illustrated in FIG. 29 , in the drawings,the P− semiconductor region 74 is a region wider than the N−semiconductor region 72, in the upward direction.

Sixteenth Embodiment

<Configuration Example of Pixel>

In addition, a P well region including a P type semiconductor region,may be further provided in addition to the oxide film 64 in thesubstrate 61 of the pixel 51.

In such a case, the pixel 51, for example, is configured as illustratedin FIG. 30 . Furthermore, in FIG. 30 , the same reference numerals willbe applied to portions corresponding to those in FIG. 2 , and thedescription thereof will be suitably omitted.

The configuration of the pixel 51 illustrated in FIG. 30 , is the sameas the configuration of the pixel 51 illustrated in FIG. 2 , except thata P well region 701 is newly provided. That is, in an exampleillustrated in FIG. 30 , the P well region 701 including a P typesemiconductor region, is formed on an upper side of the oxide film 64 inthe substrate 61, in the drawings.

As described above, according to the present technology, the CAPD sensoris configured as the rear surface irradiation type sensor, and thus, itis possible to improve the characteristics such as the pixelsensitivity.

<Equivalent Circuit Configuration Example of Pixel>

FIG. 31 illustrates an equivalent circuit of the pixel 51.

The pixel 51 includes a transfer transistor 721A, an FD 722A, a resettransistor 723A, an amplification transistor 724A, and a selectiontransistor 725A, with respect to the signal extraction unit 65-1including the N+ semiconductor region 71-1, the P+ semiconductor region73-1, and the like.

In addition, the pixel 51 includes a transfer transistor 721B, an FD722B, a reset transistor 723B, an amplification transistor 724B, and aselection transistor 725B, respect to the signal extraction unit 65-2including the N+ semiconductor region 71-2, the P+ semiconductor region73-2, and the like.

The vertical driving unit 22 applies a predetermined voltage MIX0 (afirst voltage) to the P+ semiconductor region 73-1, and applies apredetermined voltage MIX1 (a second voltage) to the P+ semiconductorregion 73-2. In the example described above, one of the voltages MIX0and MIX1 is 1.5 V, and the other is 0 V. The P+ semiconductor regions73-1 and 73-2 are a voltage application unit to which the first voltageor the second voltage is applied.

The N+ semiconductor regions 71-1 and 71-2 are a charge detection unitthat detects a charge generated by performing the photoelectricconversion with respect to light incident on the substrate 61, andaccumulates the charge.

in a case where a driving signal TRG to be supplied to a gate electrode,is in an active state, the transfer transistor 721A is in a conductionstate, and thus, transfers the charge accumulated in the N+semiconductor region 71-1, to the FD 722A. In a case where the drivingsignal TRG to be supplied to the gate electrode, is in the active state,the transfer transistor 721B is in the conduction state, and thus,transfers the charge accumulated in the N+ semiconductor region 71-2, tothe FD 722B.

The FD 722A temporarily retains the charge supplied from the N+semiconductor region 71-1. The FD 722B temporarily retains the chargesupplied from the N+ semiconductor region 71-2. The FD 722A correspondsto the FD portion A described with reference to FIG. 2 , and the FD 722Bcorresponds to the FD portion B.

In a case where the driving signal RST to be supplied to the gateelectrode, is in the active state, the reset transistor 723A is in theconduction state, and thus, resets the potential of the FD 722A to apredetermined level (a reset voltage VDD). In a case where the drivingsignal RST to be supplied to the gate electrode, in the active state,the reset transistor 723B is in the conduction state, and thus, resetsthe potential of the FD 722B to the predetermined level (the resetvoltage VDD). Furthermore, when the reset transistors 723A and 723B arein the active state, the transfer transistors 721A and 721B are also inthe active state, simultaneously.

In the amplification transistor 724A, a source electrode is connected toa vertical signal line 29A through the selection transistor 725A, andthus, the amplification transistor 724A configures a source followercircuit along with a load MOS of a constant current source circuitportion 726A connected to one end of the vertical signal line 29A. Inthe amplification transistor 724B, a source electrode is connected to avertical signal line 29B through the selection transistor 725B, andthus, the amplification transistor 724B configures a source followercircuit along with a load MOS of a constant current source circuitportion 726B connected to one end of the vertical signal line 29B.

The selection transistor 725A is connected between the source electrodeof the amplification transistor 724A and the vertical signal line 29A.In a case where the selection signal SEL to be supplied to the gateelectrode, is in the active state, the selection transistor 725A is inthe conduction state, and outputs a pixel signal output from theamplification transistor 724A, to the vertical signal line 29A.

The selection transistor 725B is connected between the source electrodeof the amplification transistor 724B and the vertical signal line 29B.In a case where the selection signal SEL to be supplied to the gateelectrode, is in the active state, the selection transistor 725B is inthe conduction state, and outputs a pixel signal output from theamplification transistor 724B, to the vertical signal line 29B.

The transfer transistors 721A and 721B, the reset transistors 723A and723B, the amplification transistors 724A and 724B, and the selectiontransistors 725A and 725B of the pixel 51, for example, are controlledby the vertical driving unit 22.

<Other Equivalent Circuit Configuration Examples of Pixel>

FIG. 32 illustrates another equivalent circuit of the pixel 51.

In FIG. 32 , the same reference numerals will be applied to portionscorresponding to those in FIG. 31 , and the description thereof will besuitably omitted.

The equivalent circuit in FIG. 32 corresponds to the equivalent circuitin FIG. 31 , and an additional capacity 727, and a switching transistor728 controlling the connection thereof, are added to both of the signalextraction units 65-1 and 65-2.

Specifically, the additional capacity 727A is connected between thetransfer transistor 721A and the FD 722A, through a switching transistor728A, and the additional capacity 727B is connected between the transfertransistor 721B and the FD 722B, through a switching transistor 728B.

In a case where a driving signal FDG to be supplied to the gateelectrode, is in the active state, the switching transistor 728A is inthe conduction state, and thus, connects the additional capacity 727A tothe FD 722A. In a case where the driving signal FDG to be supplied tothe gate electrode, is in the active state, the switching transistor728B is in the conduction state, and thus, connects the additionalcapacity 727B to the FD 722B.

For example, at a high illuminance with a large amount of incidentlight, the vertical driving unit 22 sets the switching transistors 728Aand 728B in the active state, and connects the FD 722A and theadditional capacity 727A together, and connects the FD 722B and theadditional capacity 727B together. With this arrangement, more chargescan be accumulated at a high illuminance.

On the other hand, at a low illuminance with a small amount of incidentlight, the vertical driving unit 22 sets the switching transistors 728Aand 728B in an inactive state, and disconnects the additional capacities727A and 727B from the FDs 722A and 722B, respectively.

The additional capacity 727 may be omitted as with the equivalentcircuit in FIG. 31 , but the additional capacity 727 is provided, and isdifferently used according to the amount of incident light, and thus, itis possible to ensure a high dynamic range.

<Arrangement Example of Voltage Supply Line>

Next, the arrangement of the voltage supply line for applying thepredetermined voltage MIX0 or MIX1 to the P+ semiconductor regions 73-1and 73-2 that are the voltage application unit of the signal extractionunit 65 of each of the pixels 51, will be described with reference toFIG. 33 to FIG. 35 .

Furthermore, in FIG. 33 and FIG. 34 , a circular configurationillustrated in FIG. 9 will be adopted and described as the configurationof the signal extraction unit 65 of each of the pixels 51, but it isobvious that other configurations may be adopted.

A of FIG. 33 is a plan view illustrating a first arrangement example ofthe voltage supply line.

In the first arrangement example, a voltage supply line 741-1 or 741-2is wired along the vertical direction, (on the boundary) between twopixels adjacent in the horizontal direction, with respect to a pluralityof pixels 51 two-dimensionally arranged into the shape of a matrix.

The voltage supply line 741-1 is connected to the P+ semiconductorregion 73-1 of the signal extraction unit 65-1 that is one of two signalextraction units 65 in the pixel 51. The voltage supply line 741-2 isconnected to the P+ semiconductor region 73-2 of the signal extractionunit 65-2 that is the other of two signal extraction units 65 in thepixel 51.

In the first arrangement example, two voltage supply lines 741-1 and741-2 are arranged with respect to two columns of pixels, and thus, inthe pixel array portion 21, the number of voltage supply lines 741 to bearrayed, is approximately identical to the number of columns of thepixels 51.

B of FIG. 33 is a plan view illustrating a second arrangement example ofthe voltage supply line.

In the second arrangement example, two voltage supply lines 741-1 and741-2 are wired along the vertical direction, with respect to one pixelcolumn of a plurality of pixels 51 two-dimensionally arranged into theshape of a matrix.

The voltage supply line 741-1 is connected to the P+ semiconductorregion 73-1 of the signal extraction unit 65-1 that is one of two signalextraction units 65 in the pixel 51. The voltage supply line 741-2 isconnected to the P+ semiconductor region 73-2 of the signal extractionunit 65-2 that is the other of two signal extraction units 65 in thepixel 51.

In the second arrangement example, two voltage supply lines 741-1 and741-2 are wired with respect to one pixel column, and thus, four voltagesupply lines 741 are arranged with respect to two columns of pixels. Inthe pixel array portion 21, the number of voltage supply lines 741 to bearrayed, is approximately twice the number of columns of the pixels 51.

Both of the arrangement examples of A and B of FIG. 33 , are thePeriodic arrangement in which a configuration of connecting the voltagesupply line 741-1 to the P+ semiconductor region 73-1 of the signalextraction unit 65-1, and of connecting the voltage supply line 741-2 tothe P+ semiconductor region 73-2 of the signal extraction unit 65-2, isperiodically repeated with respect to the pixels arranged in verticaldirection.

In the first arrangement example of A of FIG. 33 , it is possible todecrease the number of voltage supply lines 741-1 and 741-2 to be wiredwith respect to the pixel array portion 21.

In the second arrangement example of B of FIG. 33 , the number ofvoltage supply lines 741-1 and 741-2 to be wired, increases, compared tothe first arrangement example, but the number of signal extraction units65 to be connected to one voltage supply line 741, becomes ½, and thus,it is possible to reduce the load of the wiring, and the secondarrangement example is effective at high speed driving or when the totalnumber of pixels of the pixel array portion 21 is large.

A of FIG. 34 is a plan view illustrating a third arrangement example ofthe voltage supply line.

The third arrangement example is an example in which two voltage supplylines 741-1 and 741-2 are arranged with respect to two columns ofpixels, as with the first arrangement example of A of FIG. 33 .

The third arrangement example is different from the first arrangementexample of A of FIG. 33 , in that connection destinations of the signalextraction units 65-1 and 65-2 are different in two pixels arranged inthe vertical direction.

Specifically, for example, in a certain pixel 51, the voltage supplyline 741-1 is connected to the P+ semiconductor region 73-1 of thesignal extraction unit 65-1, and the voltage supply line 741-2 isconnected to the P+ semiconductor region 73-2 of the signal extractionunit 65-2, and in the pixels 51 above and below the certain pixel 51,the voltage supply line 741-1 is connected to the P+ semiconductorregion 73-2 of the signal extraction unit 65-2, and the voltage supplyline 741-2 is connected to the P+ semiconductor region 73-1 of thesignal extraction unit 65-1.

B of FIG. 34 is a plan view illustrating a fourth arrangement example ofthe voltage supply line.

The fourth arrangement example is an example in which two voltage supplylines 741-1 and 741-2 are arranged with respect to two columns ofpixels, as with the second arrangement example of B of FIG. 33 .

The fourth arrangement example is different from the second arrangementexample of B of FIG. 33 , in that the connection destinations of thesignal extraction units 65-1 and 65-2 are different in two pixelsarranged in the vertical direction.

Specifically, for example, in a certain pixel 51, the voltage supplyline 741-1 is connected to the P+ semiconductor region 73-1 of thesignal extraction unit 65-1, and the voltage supply line 741-2 isconnected to the P+ semiconductor region 73-2 of the signal extractionunit 65-2, and in the pixels 51 above and below the certain pixel 51,the voltage supply line 741-1 is connected to the P+ semiconductorregion 73-2 of the signal extraction unit 65-2, and the voltage supplyline 741-2 is connected to the P+ semiconductor region 73-1 of thesignal extraction unit 65-1.

In the third arrangement example of A of FIG. 34 , it is possible todecrease the number of voltage supply lines 741-1 and 741-2 to be wiredwith respect to the pixel array portion 21.

In the fourth arrangement example of B of FIG. 34 , the number ofvoltage supply lines 741-1 and 741-2 to be wired, increases, compared tothe third arrangement example, but the number of signal extraction units65 to be connected to one voltage supply line 741, becomes ½, and thus,it is possible to reduce the load of the wiring, and the fourtharrangement example is effective at high speed driving or when the totalnumber of pixels of the pixel array portion 21 is large.

Both of the arrangement examples of A and B of FIG. 34 , are the Mirrorarrangement in which the connection destinations of two pixels adjacentup and down (in the vertical direction) are mirror-inverted.

As illustrated in A of FIG. 35 , in the Periodic arrangement, voltagesto be applied to two adjacent signal extraction units 65 interposing apixel boundary, are different voltages, and thus, a charge exchangebetween the adjacent pixels occurs. For this reason, a transferefficiency of the charge is more excellent in the Periodic arrangementthan in the Mirror arrangement, but color mixture characteristics of theadjacent pixels are worse in the Periodic arrangement than in the Mirrorarrangement.

On the other hand, as illustrated in B of FIG. 35 , in the Mirrorarrangement, the voltages to be applied to two adjacent signalextraction units 65 interposing the pixel boundary, are the samevoltage, and thus, the charge exchange between the adjacent pixels issuppressed. For this reason, the transfer efficiency of the charge isworse in the Mirror arrangement than in the Periodic arrangement, thecolor mixture characteristics of the adjacent pixels are more excellentin the Mirror arrangement than in the Periodic arrangement.

<Sectional Configuration of Plurality of Pixels of FourteenthEmbodiment>

In a sectional configuration of the pixel illustrated in FIG. 2 or thelike, one of the N+ semiconductor region 71-1 and the N− semiconductorregion 72-1 surrounding the P+ semiconductor region 73-1 and the P−semiconductor region 74-1, around the P+ semiconductor region 73-1 andthe P− semiconductor region 74-1, is not illustrated. In addition, themulti-layer wiring layer formed on the surface of the substrate 61 on aside opposite to the incidence surface, is not also illustrated.

Therefore, hereinafter, in several embodiments described above,sectional views of a plurality of adjacent pixels, in which the N+semiconductor region 71-1 and the N− semiconductor region 72-1 aroundthe P+ semiconductor region 73-1 and the P− semiconductor region 74-1,or the multi-layer wiring layer are not omitted, are illustrated.

First, FIG. 36 and FIG. 37 illustrate sectional views of a plurality ofpixels of the fourteenth embodiment illustrated in FIG. 28 .

The fourteenth embodiment illustrated in FIG. 28 , is the configurationof the pixel including the reflection member 631 having a large area, ona side opposite to the incidence surface of the substrate 61.

FIG. 36 corresponds to the sectional view of line B-B′ in FIG. 11 , andFIG. 37 corresponds to the sectional view of lineA-A′ in FIG. 11 . Inaddition, the sectional view of line C-C′ in FIG. 17 , can also beillustrated as in FIG. 36 .

As illustrated in FIG. 36 , in each of the pixels 51, the oxide film 64is formed in the center portion, and the signal extraction unit 65-1 andthe signal extraction unit 65-2 are formed on both sides of the oxidefilm 64, respectively.

In the signal extraction unit 65-1, the N+ semiconductor region 71-1 andthe N− semiconductor region 72-1 are formed to surround the P+semiconductor region 73-1 and the P− semiconductor region 74-1, aroundthe P+ semiconductor region 73-1 and the P− semiconductor region 74-1.The P+ semiconductor region 73-1 and the N+ semiconductor region 71-1are in contact with a multi-layer wiring layer 811. The P− semiconductorregion 74-1 is arranged on an upper side of the P+ semiconductor region73-1 (on the on-chip lens 62 side) to cover the P+ semiconductor region73-1, and the N− semiconductor region 72-1 is arranged on an upper sideof the N+ semiconductor region 71-1 (on the on-chip lens 62 side) tocover the N+ semiconductor region 71-1. In other words, the P+semiconductor region 73-1 and the N+ semiconductor region 71-1 arearranged on the multi-layer wiring layer 811 side in the substrate 61,and the N− semiconductor region 72-1 and the P− semiconductor region74-1 are arranged on the on-chip lens 62 side in the substrate 61. Inaddition, a separation portion 75-1 for separating the N+ semiconductorregion 71-1 from the P+ semiconductor region 73-1, is formed between theN+ semiconductor region 71-1 and the P+ semiconductor region 73-1, by anoxide film or the like.

In the signal extraction unit 65-2, the N+ semiconductor region 71-2 andthe N− semiconductor region 72-2 are formed to surround the P+semiconductor region 73-2 and the P− semiconductor region 74-2, aroundthe P+ semiconductor region 73-2 and the P− semiconductor region 74-2.The P+ semiconductor region 73-2 and the N+ semiconductor region 71-2are in contact with the multi-layer wiring layer 811. The P−semiconductor region 74-2 is arranged on an upper side of the P+semiconductor region 73-2 (on the on-chip lens 62 side) to cover the P+semiconductor region 73-2, and the N− semiconductor region 72-2 isarranged on an upper side of the N+ semiconductor region 71-2 (on theon-chip lens 62 side) to cover the N+ semiconductor region 71-2. Inother words, the P+ semiconductor region 73-2 and the N+ semiconductorregion 71-2 are arranged on the multi-layer wiring layer 811 side in thesubstrate 61, and the N− semiconductor region 72-2 and the P−semiconductor region 74-2 are arranged on the on-chip lens 62 side inthe substrate 61. In addition, the separation portion 75-2 forseparating the N+ semiconductor region 71-2 from the P+ semiconductorregion 73-2, is formed between the N+ semiconductor region 71-2 and theP+ semiconductor region 73-2, by an oxide film or the like.

The oxide film 64 is also formed between the N+ semiconductor region71-1 of the signal extraction unit 65-1 of a predetermined pixel 51 andthe N+ semiconductor region 71-2 of the signal extraction unit 65-2 ofthe pixel 51 adjacent to the predetermined pixel 51, that is a boundaryregion between the adjacent pixels 51.

A film having a positive fixed charge is laminated, and thus, the P+semiconductor region 601 covering the entire light incidence surface isformed on a boundary surface on the light incidence surface side of thesubstrate 61 (on an upper surface in FIG. 36 and FIG. 37 ).

As illustrated in FIG. 36 , in a case where the on-chip lens 62 formedon the light incidence surface side of the substrate 61 in each of thepixels, is divided into a leveling portion 821 of which the thickness isevenly leveled in the entire region in the pixel, and a curve portion822 of which the thickness is different according to a position in thepixel, in a height direction, the thickness of the leveling portion 821is formed to be less than the thickness of the curve portion 822. As thethickness of the leveling portion 821 becomes thinner, oblique incidentlight is easily reflected on the inter-pixel light shielding unit 63,and thus, the thickness of the leveling portion 821 formed to be thin,and therefore, it is also possible to incorporate the oblique incidentlight in the substrate 61. In addition, as the thickness of the curveportion 822 becomes thicker, it is possible to condense the incidentlight into the pixel center.

The multi-layer wiring layer 811 is formed on the surface of thesubstrate 61 on a side opposite to the light incidence surface side onwhich the on-chip lens 62 is formed in each of the pixels. In otherwords, the substrate 61 that is a semiconductor layer, is arrangedbetween the on-chip lens 62 and the multi-layer wiring layer 811. Themulti-layer wiring layer 811 includes five layers of metal films M1 toM5, and an interlayer insulating film 812 therebetween. Furthermore, inFIG. 36 , in five layers of metal films M1 to M5 of the multi-layerwiring layer 811, the metal film M5 on the outermost side, is in aposition that is not seen, and thus, is not illustrated, but isillustrated in FIG. 37 that is a sectional view in a direction differentfrom that of the sectional view of FIG. 36 .

As illustrated in FIG. 37 , a pixel transistor Tr is formed in a pixelboundary region of a boundary surface portion of the multi-layer wiringlayer 811 with respect to the substrate 61. The pixel transistor Tr isany one of the transfer transistor 721, the reset transistor 723, theamplification transistor 724, and the selection transistor 725,illustrated in FIG. 31 and FIG. 32 .

In five layers of the metal films M1 to M5 of the multi-layer wiringlayer 811, the metal film M1 closest to the substrate 61 includes apower line 813 for supplying a power-supply voltage, voltage applicationwiring 814 for supplying a predetermined voltage to the P+ semiconductorregion 73-1 or 73-2, and a reflection member 815 that is a memberreflecting the incident light. In the metal film M1 in FIG. 36 , wiringsother than the power line 813 and the voltage application wiring 814,are illustrated as the reflection member 815, but in order to preventthe drawings from being complicated, some reference numerals areomitted. The reflection member 815 is dummy wiring provided in order toreflect the incident light, and corresponds to the reflection member 631illustrated in FIG. 28 . In plan view, the reflection member 815 isarranged on a lower side of the N+ semiconductor regions 71-1 and 71-2to overlap with the N+ semiconductor regions 71-1 and 71-2 that are thecharge detection unit. In addition, in the metal film M1, the chargeaccumulated in the N+ semiconductor region 71, is transferred to the FD722, and thus, charge extraction wiring (not illustrated in FIG. 36 )connecting the N+ semiconductor region 71 and the transfer transistor721 together, is also formed.

Furthermore, in this example, the reflection member 815 (the reflectionmember 631) and the charge extraction wiring are arranged on the samelayer of the metal film M1, but are not necessarily limited to bearranged on the same layer.

In the metal film M2 of the second layer from the substrate 61 side, forexample, voltage application wiring 816 that is connected to the voltageapplication wiring 814 of the metal film M1, a control line 817 thattransmits a driving signal TRG, a driving signal RST, a selection signalSEL, a driving signal FDG, and the like, a ground line, and the like areformed. In addition, in the metal film M2, the FD 722B or the additionalcapacity 727A is formed.

In the metal film M3 of the third layer from the substrate 61 side, forexample, the vertical signal line 29, shielding wiring, or the like isformed.

In the metal films M4 and M5 of the fourth layer and the fifth layerfrom the substrate 61 side, for example, voltage supply lines 741-1 and741-2 (FIG. 33 and FIG. 34 ) for applying the predetermined voltage MIX0or MIX1 to the P+ semiconductor regions 73-1 and 73-2 that are thevoltage application unit of the signal extraction unit 65, are formed.

Furthermore, plane arrangement of five layers of the metal films M1 toM5 of the multi-layer wiring layer 811, will be described later, withreference to FIG. 42 and FIG. 43 .

<Sectional Configuration of Plurality of Pixels of Ninth Embodiment>

FIG. 38 is a sectional view illustrating the pixel structure of theninth embodiment illustrated in FIG. 22 with respect to a plurality ofpixels, in which the N+ semiconductor region 71-1 and the N−semiconductor region 72-1, or the multi-layer wiring layer are notomitted.

The ninth embodiment illustrated in FIG. 22 , is the configuration ofthe pixel including the separation region 441 on the pixel boundary inthe substrate 61, in which the elongated groove (trench) is formed fromthe rear surface (the incidence surface) side of the substrate 61 to apredetermined depth, and the light shielding film is embedded in thegroove.

The other configuration including the signal extraction units 65-1 and65-2, five layers of the metal films M1 to M5 of the multi-layer wiringlayer 811, and the like, is similar to the configuration illustrated inFIG. 36 .

<Sectional Configuration of Plurality of Pixels of Modification Example1 of Ninth Embodiment>

FIG. 39 is a sectional view illustrating the pixel structure ofModification Example 1 of the ninth embodiment, illustrated in FIG. 23 ,with respect to a plurality of pixels, in which the N+ semiconductorregion 71-1 and the N− semiconductor region 72-1, or the multi-layerwiring layer are not omitted.

Modification Example 1 of the ninth embodiment, illustrated in FIG. 23 ,is the configuration of the pixel including the separation region 471penetrating through the entire substrate 61, on the pixel boundary inthe substrate 61.

The other configuration including the signal extraction units 65-1 and65-2, five layers of the metal films M1 to M5 of the multi-layer wiringlayer 811, and the like, is similar to the configuration illustrated inFIG. 36 .

<Sectional Configuration of Plurality of Pixels of Fifteenth Embodiment>

FIG. 40 is a sectional view illustrating the pixel structure of thefifteenth embodiment illustrated in FIG. 29 , with respect to aplurality of pixels, in which the N+ semiconductor region 71-1 and theN− semiconductor region 72-1, or the multi-layer wiring layer are notomitted.

The fifteenth embodiment illustrated in FIG. 29 , is a configurationincluding the P well region 671 in the central portion on the surface ofthe substrate 61 on a side opposite to the incidence surface, that is,in the drawings, on an inner side of a surface on a lower side. Inaddition, the separation portion 672-1 is formed between the P wellregion 671 and the N+ semiconductor region 71-1, by an oxide film or thelike. Similarly, the separation portion 672-2 is formed between the Pwell region 671 and the N+ semiconductor region 71-2, by an oxide filmor the like. The P well region 671 is also formed on the pixel boundaryof the surface of the substrate 61 on a lower side.

The other configuration including the signal extraction units 65-1 and65-2, five layers of the metal films M1 to M5 of the multi-layer wiringlayer 811, and the like, is similar to the configuration illustrated inFIG. 36 .

<Sectional Configuration of Plurality of Pixels of Tenth Embodiment>

FIG. 41 is a sectional view illustrating the pixel structure of thetenth embodiment illustrated in FIG. 24 , with respect to a plurality ofpixels, in which the N+ semiconductor region 71-1 and the N−semiconductor region 72-1, or the multi-layer wiring layer are notomitted.

The tenth embodiment illustrated in FIG. 24 , is the configuration ofthe pixel, in which the substrate 501 having a large substratethickness, is provided instead of the substrate 61.

The other configuration including the signal extraction units 65-1 and65-2, five layers of the metal films M1 to M5 of the multi-layer wiringlayer 811, and the like, is similar to the configuration illustrated inFIG. 36 .

<Plane Arrangement Example of Five Layers of Metal Films M1 To M5>

Next, a plane arrangement example of five layers of the metal films M1to M5 of the multi-layer wiring layer 811, illustrated in FIG. 36 toFIG. 41 , will be described with reference to FIG. 42 and FIG. 43 .

A of FIG. 42 illustrates a plane arrangement example of the metal filmM1 that is the first layer, in five layers of the metal films M1 to M5of the multi-layer wiring layer 811.

B of FIG. 42 illustrates a plane arrangement example of the metal filmM2 that is the second layer, in five layers of the metal films M1 to M5of the multi-layer wiring layer 811.

C of FIG. 42 illustrates a plane arrangement example of the metal filmM3 that is the third layer, in five layers of the metal films M1 to M5of the multi-layer wiring layer 811.

A of FIG. 43 illustrates a plane arrangement example of the metal filmM4 that is the fourth layer, in five layers of the metal films M1 to M5of the multi-layer wiring layer 811.

B in FIG. 43 illustrates a plane arrangement example of the metal filmM5 that is the five layers, in five layers of the metal films M1 to M5of the multi-layer wiring layer 811.

Furthermore, in A to C of FIG. 42 , and A and B of FIG. 43 , the regionof the pixel 51, and the region of the signal extraction units 65-1 and65-2 having an octagonal shape illustrated in FIG. 11 , are illustratedby a broken line.

In A to C of FIG. 42 , and A and B of FIG. 43 , the vertical directionin the drawings, is the vertical direction of the pixel array portion21, and the horizontal direction in the drawings, is the horizontaldirection of the pixel array portion 21.

As illustrated in A of FIG. 42 , the reflection member 631 that reflectsthe infrared light, is formed in the metal film M1 that is the firstlayer of the multi-layer wiring layer 811. In the region of the pixel51, two pieces of reflection members 631 are formed with respect to eachof the signal extraction units 65-1 and 65-2, and two pieces ofreflection members 631 of the signal extraction unit 65-1, and twopieces of reflection members 631 of the signal extraction unit 65-1, areformed symmetrically with respect to the vertical direction.

In addition, a pixel transistor wiring region 831 is arranged betweenthe reflection members 631 of the adjacent pixels 51 in the horizontaldirection. Wirings for connecting between the pixel transistors Tr ofthe transfer transistor 721, the reset transistor 723, the amplificationtransistor 724, or the selection transistor 725, are formed in the pixeltransistor wiring region 831. The wiring for the pixel transistor Tr isalso formed symmetrically with respect to the vertical direction, on thebasis of the intermediate line (not illustrated) of two signalextraction units 65-1 and 65-2.

In addition, wirings such as a ground line 832, a power line 833, and aground line 834, are formed between the reflection members 631 of theadjacent pixels 51 in the vertical direction. The wirings are alsoformed symmetrically with respect to the vertical direction, on thebasis of the intermediate line of two signal extraction units 65-1 and65-2.

Thus, the metal film M1 of the first layer is symmetrically arranged inthe region on the signal extraction unit 65-1 side and the region on thesignal extraction unit 65-2 side, in the pixel, and thus, a wiring loadis evenly adjusted by the signal extraction units 65-1 and 65-2. Withthis arrangement, a driving variation in the signal extraction units65-1 and 65-2 is reduced.

In the metal film M1 of the first layer, the reflection member 631having a large area, is formed on a lower side of the signal extractionunits 65-1 and 65-2 formed on the substrate 61, and thus, the infraredlight that is incident on the substrate 61 through the on-chip lens 62,and is transmitted through the substrate 61 without being subjected tothe photoelectric conversion in the substrate 61, can be incident againon the substrate 61 by being reflected on the reflection member 631.With this arrangement, the amount of infrared light to be subjected tothe photoelectric conversion in the substrate 61, increases, and thus,the quantum efficiency (QE), that is, the sensitivity of the pixel 51with respect to the infrared light can be improved.

As illustrated in B of FIG. 42 , in the metal film M2 that is the secondlayer of the multi-layer wiring layer 811, a control line region 851 inwhich control lines 841 to 844 transmitting a predetermined signal inthe horizontal direction, and the like are formed, is arranged in aposition between the signal extraction units 65-1 and 65-2. The controllines 841 to 844, for example, are a line transmitting the drivingsignal TRG, the driving signal RST, the selection signal SEL, or thedriving signal FDG.

In the metal film M2 of the second layer, the control line region 851 isarranged in the boundary region of the adjacent pixels 51, and aninfluence with respect to each of the signal extraction units 65-1 and65-2 becomes even, and thus, a driving variation in the signalextraction units 65-1 and 65-2 can be reduced.

In addition, a capacity region 852 in which the FD 722B or theadditional capacity 727A is formed, is arranged in a predeterminedregion different from the control line region 851. In the capacityregion 852, the pattern of the metal film M2 is formed into the shape ofa comb tooth, and thus, the FD 722B or the additional capacity 727A isconfigured.

The FD 722B or the additional capacity 727A is arranged on the metalfilm M2 that is the second layer, and thus, it is possible to freelyarrange the pattern of the FD 722B or the additional capacity 727A,according to desired wiring capacity on design, and to improve a designfreedom.

As illustrated in C of FIG. 42 , in the metal film M3 that is the thirdlayer of the multi-layer wiring layer 811, at least the vertical signalline 29 transmitting the pixel signal output from each of the pixels 51to the column processor 23, is formed. In order to improve a readingspeed of the pixel signal, three or more vertical signal lines 29 can bearranged with respect to one pixel column. In addition, shield wiringmay be arranged other than the vertical signal line 29, and thus,coupling capacity may be reduced.

In the metal film M4 of the fourth layer and the metal film M5 of thefifth layer of the multi-layer wiring layer 811, the voltage supplylines 741-1 and 741-2 for applying the predetermined voltage MIX0 orMIX1 to the P+ semiconductor regions 73-1 and 73-2 of the signalextraction unit 65 of each of the pixels 51, are formed.

The metal film M4 and the metal film M5, illustrated in A and B of FIG.43 , illustrate an example in the case of adopting the voltage supplyline 741 of the first arrangement example illustrated in A of FIG. 33 .

The voltage supply line 741-1 of the metal film M4 is connected to thevoltage application wiring 814 (for example, FIG. 36 ) of the metal filmM1 through the metal films M3 and M2, and the voltage application wiring814 is connected to the P+ semiconductor region 73-1 of the signalextraction unit 65-1 of the pixel 51. Similarly, the voltage supply line741-2 of the metal film M4 is connected to the voltage applicationwiring 814 (for example, FIG. 36 ) of the metal film M1 through themetal films M3 and M2, and the voltage application wiring 814 isconnected to the P+ semiconductor region 73-2 of the signal extractionunit 65-2 of the pixel 51.

The voltage supply lines 741-1 and 741-2 of the metal film M5 areconnected to the driving unit of the peripheral circuit portion in theperiphery of the pixel array portion 21. The voltage supply line 741-1of the metal film M4, and the voltage supply line 741-1 of the metalfilm M5 are connected to each other in a predetermined position whereboth of the metal films exist in a plane region, through a via (notillustrated) or the like. A predetermined voltage (the voltage MIX0 orMIX1) from the driving unit of the peripheral circuit portion in theperiphery of the pixel array portion 21, is transmitted to the voltagesupply lines 741-1 and 741-2 of the metal film M5, is supplied to thevoltage supply lines 741-1 and 741-2 of the metal film M4 bytransmitting, and is supplied to the voltage application wiring 814 ofthe metal film M1 from the voltage supply lines 741-1 and 741-2 throughthe metal films M3 and M2.

As described above, the pixel 51 can be driven only by the verticaldriving unit 22, and can be controlled by the horizontal driving unit24, or a driving unit separately provided from the vertical driving unit22 and the horizontal driving unit 24, through a control line wired inthe vertical direction.

The solid-state imaging element 11 is configured as the rear surfaceirradiation type CAPD sensor, and thus, for example, as illustrated in Aand B of FIG. 43 , the voltage supply lines 741-1 and 741-2 for applyingthe predetermined voltage MIX0 or MIX1 to the signal extraction unit 65of each of the pixels 51, can be wired in the vertical direction, forexample, and a wiring width and a layout of driving wiring can be freelydesigned. In addition, wiring suitable for high speed driving or wiringconsidering a load reduction, is also possible.

<Plane Arrangement Example of Pixel Transistor>

FIG. 44 is a plan view in which the metal film M1 of the first layerillustrated in A of FIG. 42 , and a polysilicon layer forming the gateelectrode or the like of the pixel transistor Tr formed on the metalfilm M1, overlap with each other.

A of FIG. 44 is a plan view in which the metal film M1 in C of FIG. 44and the polysilicon layer in B of FIG. 44 , overlap with each other, Bof FIG. 44 is a plan view of only the polysilicon layer, and C of FIG.44 is a plan view of only the metal film M1. The plan view of the metalfilm M1 in C of FIG. 44 is the same as the plan view illustrated in A ofFIG. 42 , but hatching is omitted.

As described with reference to A of FIG. 42 , the pixel transistorwiring region 831 is formed between the reflection members 631 of eachof the pixels.

As illustrated in B of FIG. 44 , the pixel transistors Tr correspondingto each of the signal extraction units 65-1 and 65-2, for example, arearranged in the pixel transistor wiring region 831.

In B of FIG. 44 , the gate electrodes of the reset transistors 723A and723B, the transfer transistors 721A and 721B, the switching transistors728A and 728B, the selection transistors 725A and 725B, and theamplification transistors 724A and 724B, are formed from a side close tothe intermediate line, on the basis of the intermediate line (notillustrated) of two signal extraction units 65-1 and 65-2.

Wiring connecting between the pixel transistors Tr of the metal film M1,illustrated in C of FIG. 44 , is formed symmetrically with respect tothe vertical direction, on the basis of the intermediate line (notillustrated) of two signal extraction units 65-1 and 65-2.

Thus, a plurality of pixel transistors Tr in the pixel transistor wiringregion 831 are symmetrically arranged in the region on the signalextraction unit 65-1 side and the region on the signal extraction unit65-2 side, and thus, a driving variation in the signal extraction units65-1 and 65-2 can be reduced.

Modification Example of Reflection Member 631

Next, a modification example of the reflection member 631 formed on themetal film M1, will be described with reference to FIG. 45 and FIG. 46 .

In the example described above, as illustrated in A of FIG. 42 , thereflection member 631 having a large area, is arranged in a region thatis the periphery of the signal extraction unit 65 in the pixel 51.

In contrast, for example, as illustrated in A of FIG. 45 , thereflection member 631 can be arranged in a lattice-shaped pattern. Thus,the reflection member 631 is formed in the lattice-shaped pattern, andthus, pattern anisotropy can be eliminated, and XY anisotropy ofreflexibility can be reduced. In other words, the reflection member 631is formed in the lattice-shaped pattern, and thus, the reflection of theincident light on a biased partial region can be reduced, and isotropicreflection can be easily performed, and therefore, a distance measuringaccuracy is improved.

In addition, as illustrated in B of FIG. 45 , the reflection member 631,for example, may be arranged in a stripe-shaped pattern. Thus, thereflection member 631 is formed in a stripe-shaped pattern, and thus,the pattern of the reflection member 631 can also be used as wiringcapacity, and therefore, it is possible to realize a configuration inwhich a dynamic range extends to the maximum.

Furthermore, B of FIG. 45 is an example of a stripe shape in thevertical direction, but may be a stripe shape in the horizontaldirection.

In addition, as illustrated in C of FIG. 45 , the reflection member 631,for example, may be arranged only in a pixel center region, morespecifically, only between two signal extraction units 65. Thus, thereflection member 631 is formed in the pixel center region, and is notformed on a pixel end, and thus, it is possible to suppress a componentreflected on the adjacent pixel in a case where oblique light isincident, and to realize a configuration focusing on the suppression ofthe color mixture, while obtaining a sensitivity improvement effect ofthe reflection member 631 with respect to the pixel center region.

In addition, as illustrated in A of FIG. 46 , a part of the reflectionmember 631, for example, is arranged in a comb tooth-shaped pattern, andthus, a part of the metal film M1 may be allocated to the wiringcapacity of the FD 722 or the additional capacity 727. In A of FIG. 46 ,a comb tooth shape in regions 861 to 864 surrounded by a solid linecircle, configures at least a part of the FD 722 or the additionalcapacity 727. The FD 722 or the additional capacity 727 may be arrangedby being suitably sorted into the metal film M1 and the metal film M2.The pattern of the metal film M1 can be arranged in the reflectionmember 631, and the capacity of the FD 722 or the additional capacity727, with excellent balance.

B of FIG. 46 illustrates the pattern of the metal film M1 in a casewhere the reflection member 631 is not arranged. In order to increasethe amount of infrared light to be subjected to the photoelectricconversion in the substrate 61, and to improve the sensitivity of thepixel 51, it is preferable that the reflection member 631 is arranged,but it is also possible to adopt a configuration in which the reflectionmember 631 is not arranged.

<Substrate Configuration Example of Solid-State Imaging Element>

In the solid-state imaging element 11 in FIG. 1 , any substrateconfiguration of A to C of FIG. 47 can be adopted.

A of FIG. 47 illustrates an example in which the solid-state imagingelement 11 includes one piece of semiconductor substrate 911, and asupport substrate 912 under the semiconductor substrate 911.

In this case, a pixel array region 951 corresponding to the pixel arrayportion 21 described above, a control circuit 952 controlling each pixelof the pixel array region 951, and a logic circuit 953 including asignal processing circuit of a pixel signal, are formed in thesemiconductor substrate 911 on an upper side.

The control circuit 952 includes the vertical driving unit 22, thehorizontal driving unit 24, or the like, described above. The logiccircuit 953 includes the column processor 23 performing AD conversionprocessing of a pixel signal, or the like, and the signal processor 26performing distance calculate processing of calculating a distance froma ratio of pixel signals acquired in each of two or more signalextraction units 65 in the pixel, calibration processing, or the like.

In addition, as illustrated in B of FIG. 47 , in the solid-state imagingelement 11, a first semiconductor substrate 921 on which the pixel arrayregion 951 and the control circuit 952 are formed, and a secondsemiconductor substrate 922 on which the logic circuit 953 is formed,can be laminated. Furthermore, the first semiconductor substrate 921 andthe second semiconductor substrate 922, for example, are electricallyconnected to each other through a through via or a metallic bond ofCu—Cu.

In addition, as illustrated in C of FIG. 47 , in the solid-state imagingelement 11, a first semiconductor substrate 931 on which only the pixelarray region 951 is formed, and a second semiconductor substrate 932 onwhich an area control circuit 954 provided with the control circuitcontrolling each of the pixels, and the signal processing circuitprocessing the pixel signal, in one unit or in area unit of a pluralityof pixels, is formed, can be laminated. The first semiconductorsubstrate 931 and the second semiconductor substrate 932, for example,are electrically connected to each other through a through via or ametallic bond of Cu—Cu.

As with the solid-state imaging element 11 in C of FIG. 47 , accordingto the configuration in which the control circuit and the signalprocessing circuit are provided in one pixel unit or in area unit, it ispossible to set an optimal driving timing or gain in each divisioncontrol unit, and to acquire optimized distance information regardlessof a distance or a reflection rate. In addition, it is possible tocalculate the distance information by driving only a part of the region,but not the entire pixel array region 951, and thus, it is also possibleto suppress the power consumption according to an operation mode.

<Configuration Example of Distance Measuring Module>

FIG. 48 is a block diagram illustrating a configuration example of adistance measuring module outputting distance measuring information byusing the solid-state imaging element 11 in FIG. 1 .

A distance measuring module 1000 includes a light emitting unit 1011, alight emitting controller 1012, and a light receiving unit 1013.

The light emitting unit 1011 includes a light source emitting light of apredetermined wavelength, emits irradiation light of which thebrightness periodically fluctuates, and irradiates an object with theirradiation light. For example, the light emitting unit 1011 includes alight emitting diode emitting infrared light of which the wavelength isin a range of 780 nm to 1000 nm, as a light source, and generates theirradiation light in synchronization with a light emitting controlsignal CLKp of a rectangular wave to be supplied from the light emittingcontroller 1012.

Furthermore, the light emitting control signal CLKp is not limited tothe rectangular wave, insofar as being a periodic signal. For example,the light emitting control signal CLKp may be a sine wave.

The light emitting controller 1012 supplies the light emitting controlsignal CLKp to the light emitting unit 1011 and the light receiving unit1013, and controls an irradiation timing of the irradiation light. Thefrequency of the light emitting control signal CLKp, for example, is 20megahertz (MHz). Furthermore, the frequency of the light emittingcontrol signal CLKp is not limited to 20 megahertz (MHz), and may be 5megahertz (MHz) or the like.

The light receiving unit 1013 receives reflection light from the object,calculates the distance information for each of the pixels, according toa light receiving result, generates a depth image representing adistance to the object by a grayscale value for each of the pixels, andoutputs the depth image.

The solid-state imaging element 11 described above is used in the lightreceiving unit 1013, and the solid-state imaging element 11 as the lightreceiving unit 1013, for example, calculates the distance informationfor each of the pixels, from a signal intensity detected by the chargedetection unit (the N+ semiconductor region 71) of each of the signalextraction units 65-1 and 65-2 of each of the pixels 51 of the pixelarray portion 21, on the basis of the light emitting control signalCLKp.

As described above, the solid-state imaging element 11 in FIG. 1 , canbe incorporated as the light receiving unit 1013 of the distancemeasuring module 1000 that obtains and outputs the distance informationto a subject by the indirect ToF method. The solid-state imaging element11 of each of the embodiments described above, specifically, asolid-state imaging element with an improved pixel sensitivity, as therear surface irradiation type sensor, is adopted as the light receivingunit 1013 of the distance measuring module 1000, and thus, it ispossible to improve distance measuring characteristics as the distancemeasuring module 1000.

As described above, according to the present technology, the CAPD sensoris configured as a rear surface irradiation type light receivingelement, and thus, it is possible to improve the distance measuringcharacteristics.

Furthermore, in the present technology, it is obvious that theembodiments described above can be suitably combined. That is, forexample, it is possible to suitably select the number of signalextraction units or the arrangement position of the signal extractionunits to be provided in the pixel, whether or not to set the shape or ashare structure of the signal extraction unit, the presence or absenceof the on-chip lens, the presence or absence of the inter-pixel lightshielding unit, the presence or absence of the separation region, thethickness of the on-chip lens or the substrate, the type of substrate orfilm design, the presence or absence of the bias with respect to theincidence surface, the presence or absence of the reflection member, andthe like, according to which characteristics such as the pixelsensitivity, are prioritized.

In addition, in the above description, an example in which the electronis used as the signal carrier, has been described, but the holegenerated by the photoelectric conversion, may be used as the signalcarrier. In such a case, it is sufficient the charge detection unit fordetecting the signal carrier, includes the P+ semiconductor region, andvoltage application unit for generating the electrical field in thesubstrate, includes the N+ semiconductor region, and thus, the hole asthe signal carrier is detected in the charge detection unit provided inthe signal extraction unit.

<Application Example with respect to Mobile Object>

The technology according to the present disclosure (the presenttechnology), can be applied to various products. For example, thetechnology according to the present disclosure, may be realized as adevice to be mounted on any type of mobile object of an automobile, anelectric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, apersonal mobility, an airplane, a drone, a ship, a robot, and the like.

FIG. 49 is a block diagram illustrating a schematic configurationexample of a vehicle control system that is an example of a mobileobject control system to which the technology according to the presentdisclosure can be applied.

A vehicle control system 12000 includes a plurality of electron controlunits connected to each other through a communication network 12001. Inthe example illustrated in FIG. 49 , the vehicle control system 12000includes a driving system control unit 12010, a body system control unit12020, a vehicle exterior information detection unit 12030, a vehicleinterior information detection unit 12040, and an integrated controlunit 12050. In addition, a microcomputer 12051, a sound and image outputunit 12052, and an in-vehicle network interface (I/F) 12053 areillustrated as a function configuration of the integrated control unit12050.

The driving system control unit 12010 controls the operation of a devicerelevant to a driving system of a vehicle, according to variousprograms. For example, the driving system control unit 12010 functionsas a control device of a driving force generating device for generatinga driving force of the vehicle, such as an internal-combustion engine ora driving motor, a driving force transfer mechanism for transferring adriving force to wheels, a steering mechanism adjusting a steering angleof the vehicle, a braking device generating a braking force of thevehicle, and the like.

The body system control unit 12020 controls the operations of variousdevices mounted on a vehicle body, according to various programs. Forexample, the body system control unit 12020 functions as a controldevice of a keyless entry system, a smart key system, a power windowdevice, or various lamps such as a head lamp, a back lamp, a brake lamp,an indicator, or a fog lamp. In this case, a radiowave emitted from aportable device that substitutes a key or signals of various switchescan be input into the body system control unit 12020. The body systemcontrol unit 12020 receives the input of the radiowave or the signal,and controls a door locking device, the power window device, the lamp,or the like of the vehicle.

The vehicle exterior information detection unit 12030 detects exteriorinformation of the vehicle on which the vehicle control system 12000 ismounted. For example, an imaging unit 12031 is connected to the vehicleexterior information detection unit 12030. The vehicle exteriorinformation detection unit 12030 allows the imaging unit 12031 to imagethe vehicle exterior, and receives the image. The vehicle exteriorinformation detection unit 12030 may perform object detection processingof a person, a car, an obstacle, a sign, a character on the roadsurface, or the like, or distance detection processing, on the basis ofthe received image.

The imaging unit 12031 is a light sensor that receives light, andoutputs an electric signal according to the amount of received light.The imaging unit 12031 is capable of outputting the electric signal asan image, and is also capable of outputting the electric signal as thedistance measuring information. In addition, the light received by theimaging unit 12031, may be visible light, or may be non-visible lightsuch as an infrared ray.

The vehicle interior information detection unit 12040 detects vehicleinterior information. For example, a driver state detection unit 12041detecting the state of a driver, is connected to the vehicle interiorinformation detection unit 12040. The driver state detection unit 12041,for example, includes a camera imaging the driver, and the vehicleinterior information detection unit 12040 may calculate the degree offatigue or the degree of concentration of the driver, or may determinewhether or not the driver dozes off, on the basis of detectioninformation input from the driver state detection unit 12041.

The microcomputer 12051 is capable of calculating a control target valueof the driving force generating device, the steering mechanism, or thebraking device, and is capable of outputting a control command to thedriving system control unit 12010, on the basis of the vehicle interiorinformation or the vehicle exterior information acquired by the vehicleexterior information detection unit 12030 or the vehicle interiorinformation detection unit 12040. For example, the microcomputer 12051is capable of performing cooperative control for realizing the functionof an advanced driver assistance system (ADAS), including collisionavoidance or impact relaxation of the vehicle, follow-up traveling basedon an inter-vehicular distance, vehicle speed maintaining traveling, acollision warning of the vehicle, a lane departure warning or thevehicle, or the like.

In addition, the microcomputer 12051 controls the driving forcegenerating device, the steering mechanism, the braking device, or thelike, on the basis of the information around the vehicle, acquired bythe vehicle exterior information detection unit 12030 or the vehicleinterior information detection unit 12040, and thus, is capable ofperforming cooperative control for automated driving or the like inwhich a vehicle autonomously travels regardless of the manipulation ofthe driver.

In addition, the microcomputer 12051 is capable of outputting thecontrol command to the body system control unit 12020, on the basis ofthe vehicle exterior information acquired by the vehicle exteriorinformation detection unit 12030. For example, the microcomputer 12051is capable of performing cooperative control for controlling a head lampaccording to the position of the leading vehicle or the oncomingvehicle, sensed by the vehicle exterior information detection unit12030, and for performing antiglaring such as switching a high beam intoa low beam.

The sound and image output unit 12052 transmits an output signal of atleast one of a sound or an image to an output device that is capable ofvisually or audibly notifying information to a passenger of the vehicleor the vehicle exterior. In the example of FIG. 49 , an audio speaker12061, a display unit 12062, and an instrument panel 12063 areexemplified as the output device. The display unit 12062, for example,may include at least one of an on-board display or a head-up display.

FIG. 50 is a diagram illustrating an example of an installation positionof the imaging unit 12031.

In FIG. 50 , a vehicle 12100 includes imaging units 12101, 12102, 12103,12104, and 12105, as the imaging unit 12031.

The imaging units 12101, 12102, 12103, 12104, and 12105, for example,are provided in a position such as a front nose, a side mirror, a rearbumper, and a backdoor of the vehicle 12100, and an upper portion of afront glass in the vehicle. The imaging unit 12101 provided in the frontnose and the imaging unit 12105 provided in the upper portion of thefront glass in the vehicle, mainly acquire the image of the vehicle12100 on a front side. The imaging units 12102 and 12103 provided in theside mirror, mainly acquire the image of the vehicle 12100 on a lateralside. The imaging unit 12104 provided in the rear bumper or thebackdoor, mainly acquires the image of the vehicle 12100 on a rear side.The image on the front side, acquired by the imaging units 12101 and12105, is mainly used for detecting the leading vehicle, a pedestrian,an obstacle, a traffic light, a traffic sign, a traffic lane, or thelike.

Furthermore, FIG. 50 illustrates an example of an imaging range of theimaging units 12101 to 12104. An imaging range 12111 indicates animaging range of the imaging unit 12101 provided in the front nose,imaging ranges 12112 and 12113 indicate imaging ranges of the imagingunits 12102 and 12103 respectively provided in the side mirrors, and animaging range 12114 indicates an imaging range of the imaging unit 12104provided in the rear bumper or the backdoor. For example, an overheadimage of the vehicle 12100 seen from an upper side, is obtained byoverlapping image data imaged by the imaging units 12101 to 12104.

At least one of the imaging units 12101 to 12104, may have a function ofacquiring the distance information. For example, at least one of theimaging units 12101 to 12104 may be a stereo camera including aplurality of imaging elements, or may be an imaging element including apixel for detecting a phase difference.

For example, the microcomputer 12051 obtains a distance to each solidobject in the imaging ranges 12111 to 12114, and a temporal change inthe distance (a relative speed with respect to the vehicle 12100), onthe basis of the distance information obtained from the imaging units12101 to 12104, and thus, in the closest solid object on a travelingpath of the particularly vehicle 12100, it is possible to extract asolid object traveling at a predetermined speed (for example, greaterthan or equal to 0 km/h), in a direction approximately identical to thevehicle 12100, as the leading vehicle. Further, the microcomputer 12051sets the inter-vehicular distance to be ensured in advance in front ofthe leading vehicle, and thus, is capable of performing automatic brakecontrol (also including follow-up stop control), automatic accelerationcontrol (also including follow-up start control), or the like. Thus, itis possible to perform the cooperative control for the automated drivingor the like in which the vehicle autonomously travels regardless of themanipulation of the driver.

For example, the microcomputer 12051 extracts solid object dataassociated with the solid object, by sorting the solid object data intoother solid objects such as a two-wheeled vehicle, an ordinary vehicle,a heavy-duty vehicle, a pedestrian, and a power pole, and thus, iscapable of using the solid object data in automatic avoidance of theobstacle, on the basis of the distance information obtained from theimaging units 12101 to 12104. For example, the microcomputer 12051identifies the obstacle in the periphery of the vehicle 12100, into anobstacle that is visible for the driver of the vehicle 12100, and anobstacle that is difficult to be seen by the driver. Then, themicrocomputer 12051 determines collision risk indicating the degree ofrisk of collision with respect to each of the obstacles, and when thecollision risk is greater than or equal to a setting value, and there isa possibility of collision, a warning is output to the driver throughthe audio speaker 12061 or the display unit 12062, or forceddeceleration or avoidance steering is performed through the drivingsystem control unit 12010, and thus, driving support for collisionavoidance can be performed.

At least one of the imaging units 12101 to 12104, may be an infrared raycamera detecting an infrared ray. For example, the microcomputer 12051determines whether or not a pedestrian exists in the images imaged bythe imaging units 12101 to 12104, and thus, it is possible to recognizethe pedestrian. Such recognition of the pedestrian, for example, isperformed in a procedure of extracting a characteristic point in theimages imaged by the imaging units 12101 to 12104 as the infrared raycamera, and a procedure of determining whether or not there is apedestrian by performing pattern matching processing with respect to aset of characteristic points representing the outline of the object. Ina case where the microcomputer 12051 determines that there is apedestrian in the images imaged by the imaging units 12101 to 12104, andrecognizes the pedestrian, the sound and image output unit 12052controls the display unit 12062 such that a square outline for emphasisis superimposition-displayed on the recognized pedestrian. In addition,the sound and image output unit 12052 may control the display unit 12062such that an icon or the like representing the pedestrian, is displayedin a desired position.

As described above, an example of the vehicle control system to whichthe technology according to the present disclosure can be applied, hasbeen described. In the configurations described above, the technologyaccording to the present disclosure can be applied to the imaging unit12031. Specifically, for example, the solid-state imaging element 11illustrated in FIG. 1 is applied to the imaging unit 12031, and thus, itis possible to improve the characteristics such as the sensitivity.

In addition, the embodiments of the present technology are not limitedto the embodiments described above, and various changes can be performedwithin a range not departing from the gist of the present technology.

In addition, the effects described herein are merely an example, and arenot limited, and other effects may be provided.

Further, the present technology is also capable of having the followingconfigurations.

(A1)

A light receiving element, including:

an on-chip lens;

a wiring layer; and

a semiconductor layer arranged between the on-chip lens and the wiringlayer,

in which the semiconductor layer includes

a first voltage application unit to which a first voltage is applied,

a second voltage application unit to which a second voltage is applied,the second voltage being different from the first voltage,

a first charge detection unit arranged around the first voltageapplication unit, and

a second charge detection unit arranged around the second voltageapplication unit,

the wiring layer includes

at least one layer including first voltage application wiring configuredto supply the first voltage, second voltage application wiringconfigured to supply the second voltage, and a reflection member, and

the reflection member is provided to overlap with the first chargedetection unit or the second charge detection unit, in plan view.

(A2)

The light receiving element according to (A1), in which the firstvoltage application unit, the second voltage application unit, the firstcharge detection unit, and the second charge detection unit are incontact with the wiring layer.

(A3)

The light receiving element according to (A1) or (A2), in which the onelayer including the first voltage application wiring, the second voltageapplication wiring, and the reflection member, includes a layer closestto the semiconductor layer.

(A4)

The light receiving element according to any one of (A1) to (A3), inwhich the first voltage application unit or the second voltageapplication unit includes

a first region containing an acceptor element at a first impurityconcentration, on the wiring layer side, and

a second region containing an acceptor element at a second impurityconcentration lower than the first impurity concentration, on theon-chip lens side.

(A5)

The light receiving element according to any one of (A1) to (A4), inwhich the first charge detection unit or the second charge detectionunit includes

a third region containing a donor element at a third impurityconcentration, on the wiring layer side, and

a fourth region containing a donor element at a second impurityconcentration lower than the third impurity concentration, on theon-chip lens side.

(A6)

The light receiving element according to any one of (A1) to (A5), inwhich the reflection member includes a metal film.

(A7)

The light receiving element according to any one of (A1) to (A6), inwhich the reflection member is symmetrically arranged in a region on thefirst charge detection unit side and a region on the second chargedetection unit side.

(A8)

The light receiving element according to any one of (A1) to (A7), inwhich the reflection member is arranged in a lattice-shaped pattern.

(A9)

The light receiving element according to any one of (A1) to (A7), inwhich the reflection member is arranged in a stripe-shaped pattern.

(A10)

The light receiving element according to any one of (A1) to (A7), inwhich the reflection member is arranged only in a pixel center region.

(A11)

The light receiving element according to any one of (A1) to (A7), inwhich the wiring layer further includes wiring capacity on a same layeras that of the reflection member.

(A12)

The light receiving element according to any one of (A1) to (A11), inwhich the wiring layer further includes wiring capacity on a layerdifferent from that of the reflection member.

(A13)

The light receiving element according to any one of (A1) to (A12), inwhich the wiring layer further includes a voltage supply line configuredto supply the first voltage or the second voltage to the first voltageapplication wiring and the second voltage application wiring.

(A14)

The light receiving element according to (A13), in which the voltagesupply line is arranged in Mirror arrangement in which connectiondestinations with respect to two pixels vertically adjacent to eachother are mirror-inverted.

(A15)

The light receiving element according to (A13), in which the voltagesupply line is arranged in Periodic arrangement periodically repeatedwith respect to pixels arranged in a vertical direction.

(A16)

The light receiving element according to anyone of (A13) to (A15), inwhich two of the voltage supply lines are arranged with respect to twocolumns of pixels.

(A17)

The light receiving element according to anyone of (A13) to (A15), inwhich four of the voltage supply lines are arranged with respect to twocolumns of pixels.

(A18)

The light receiving element according to any one of (A1) to (A17), inwhich the wiring layer further includes

a first pixel transistor configured to drive the first charge detectionunit, and

a second pixel transistor configured to drive the second chargedetection unit, and

the first pixel transistor and the second pixel transistor aresymmetrically arranged.

(B1)

An imaging element, including:

a pixel array portion including a plurality of pixels configured toperform photoelectric conversion with respect to incident light,

in which the pixel includes

a substrate configured to perform the photoelectric conversion withrespect to the incident light, and

a signal extraction unit including a voltage application unit forgenerating an electrical field by applying a voltage to the substrate,and a charge detection unit for detecting a signal carrier generated bythe photoelectric conversion, the signal extraction unit being providedon a surface of the substrate on a side opposite to an incidence surfaceon which the light is incident, in the substrate.

(B2)

The imaging element according to (B1), in which two of the signalextraction units are formed in the pixel.

(B3)

The imaging element according to (B1), in which one of the signalextraction units is formed in the pixel.

(B4)

The imaging element according to (B1), in which three or more of thesignal extraction units are formed in the pixel.

(B5)

The imaging element according to (B1), in which the signal extractionunit is shared between the pixel, and another pixel adjacent to thepixel.

(B6)

The imaging element according to (B1), in which the voltage applicationunit is shared between the pixel, and another pixel adjacent to thepixel.

(B7)

The imaging element according to any one of (B1) to (B6), in which thesignal extraction unit includes a P type semiconductor region as thevoltage application unit, and an N type semiconductor region as thecharge detection unit, the N type semiconductor region being formed tosurround the P type semiconductor region.

(B8)

The imaging element according to any one of (B1) to (B6), in which thesignal extraction unit includes an N type semiconductor region as thecharge detection unit, and a P type semiconductor region as the voltageapplication unit, the P type semiconductor region being formed tosurround the N type semiconductor region.

(B9)

The imaging element according to any one of (B1) to (B6), in which thesignal extraction unit includes a first N type semiconductor region anda second N type semiconductor region as the charge detection unit, and aP type semiconductor region as the voltage application unit, the P typesemiconductor region being formed in a position interposed between thefirst N type semiconductor region and the second N type semiconductorregion.

(B10)

The imaging element according to any one of (B1) to (B6), in which thesignal extraction unit includes a first P type semiconductor region anda second P type semiconductor region as the voltage application unit,and an N type semiconductor region as the charge detection unit, the Ntype semiconductor region being formed in a position interposed betweenthe first P type semiconductor region and the second P typesemiconductor region.

(B11)

The imaging element according to anyone of (B1) to (B10), in which avoltage is applied to the incidence surface side in the substrate.

(B12)

The imaging element according to anyone of (B1) to (B11), in which thepixel further includes a reflection member configured to reflect thelight incident on the substrate from the incidence surface, thereflection member being formed on a surface of the substrate on a sideopposite to the incidence surface.

(B13)

The imaging element according to any one of (B1) to (B12), in which thesignal carrier includes an electron.

(B14)

The imaging element according to any one of (B1) to (B12), in which thesignal carrier includes a hole.

(B15)

The imaging element according to anyone of (B1) to (B14), in which thepixel further includes a lens configured to condense the light and toallow the light to be incident on the substrate.

(B16)

The imaging element according to any one of (B1) to (B15), in which thepixel further includes an inter-pixel light shielding unit configured toshield the incident light, the inter-pixel light shielding unit beingformed in a pixel end portion on the incidence surface of the substrate.

(B17)

The imaging element according to any one of (B1) to (B16), in which thepixel further includes a pixel separation region configured to penetratethrough at least a part of the substrate and to shield the incidentlight, the pixel separation region being formed in a pixel end portionin the substrate.

(B18)

The imaging element according to any one of (B1) to (B17), in which thesubstrate includes a P type semiconductor substrate having resistance ofgreater than or equal to 500 [Ωcm].

(B19)

The imaging element according to anyone of (B1) to (B17), in which thesubstrate includes an N type semiconductor substrate having resistanceof greater than or equal to 500 [Ωcm].

(B20)

An imaging device, including:

a pixel array portion including a plurality of pixels configured toperform photoelectric conversion with respect to incident light; and

a signal processor configured to calculate distance information to atarget, on a basis of a signal output from the pixel,

in which the pixel includes

a substrate configured to perform the photoelectric conversion withrespect to the incident light, and

a signal extraction unit including a voltage application unit forgenerating an electrical field by applying a voltage to the substrate,and a charge detection unit for detecting a signal carrier generated bythe photoelectric conversion, the signal extraction unit being providedon a surface of the substrate on a side opposite to an incidence surfaceon which the light is incident, in the substrate.

REFERENCE SIGNS LIST

-   11 Solid-state imaging element-   21 Pixel array portion-   22 Vertical driving unit-   51 Pixel-   61 Substrate-   62 On-chip lens-   71-1, 71-2, 71 N+ semiconductor region-   73-1, 73-2, 73 P+ semiconductor region-   441-1, 441-2, 441 Separated region-   471-1, 471-2, 471 Separated region-   631 Reflection member-   721 Transfer transistor-   722 FD-   723 Reset transistor-   724 Amplification transistor-   725 Selection transistor-   727 Additional capacity-   728 Switching transistor-   741 Voltage supply line-   811 Multi-layer wiring layer-   812 Interlayer insulating film-   813 Power line-   814 Voltage application wiring-   815 Reflection member-   816 Voltage application wiring-   817 Control line-   M1 to M5 Metal film

The invention claimed is:
 1. A light receiving element, comprising: anon-chip lens; a multi wiring layer; a semiconductor layer arrangedbetween the on-chip lens and the multi wiring layer; a first voltageapplication unit configured to apply a first voltage to thesemiconductor layer; a second voltage application unit configured toapply a second voltage to the semiconductor layer; a first chargedetection unit; a second charge detection unit, wherein the first chargedetection unit is spaced apart from the second charge detection unit,and wherein the on-chip lens overlaps the first and second chargedetection units; a first wiring connected to the first voltageapplication unit and disposed in the multi wiring layer; a second wiringconnected to the second voltage application unit and disposed in themulti wiring layer; and a reflection member disposed in the multi wiringlayer, wherein the reflection member overlaps at least one of the firstcharge detection unit or the second charge detection unit, and whereinat least a portion of the first wiring, at least a portion of the secondwiring, and the reflection member-s are in a layer of the multi wiringlayer closest to the semiconductor layer.
 2. The light receiving elementaccording to claim 1, further comprising a plurality of reflectionmembers disposed in the multi wiring layer, wherein a first reflectionmember included in the plurality of reflection members at leastpartially overlaps the first charge detection unit, and wherein a secondreflection member included in the plurality of reflection members atleast partially overlaps the second charge detection unit.
 3. The lightreceiving element according to claim 1, wherein the reflection memberincludes a metal film.
 4. The light receiving element according to claim1, wherein the reflection member is symmetrically arranged in a regionon the first charge detection unit side and a region on the secondcharge detection unit side.
 5. The light receiving element according toclaim 1, wherein the reflection member is arranged only in a pixelcenter region.
 6. The light receiving element according to claim 1,wherein the first voltage application unit, the second voltageapplication unit, the first charge detection unit, and the second chargedetection unit are in contact with the multi wiring layer.
 7. The lightreceiving element according to claim 1, wherein the multi wiring layer,including the first wiring, the second wiring, and the reflectionmember, is formed on surface of the semiconductor layer on a sideopposite to a light incident surface side of the semiconductor layer. 8.The light receiving element according to claim 1, wherein the firstvoltage application unit or the second voltage application unitincludes, a first region containing an acceptor element at a firstimpurity concentration on a side of the semiconductor layer adjacent themulti wiring layer, and a second region containing an acceptor elementat a second impurity concentration lower than the first impurityconcentration on a side of the semiconductor layer adjacent the on-chiplens.
 9. The light receiving element according to claim 8, wherein thefirst charge detection unit or the second charge detection unitincludes, a third region containing a donor element at a third impurityconcentration on the side of the semiconductor layer adjacent the multiwiring layer, and a fourth region containing a donor element at a secondimpurity concentration lower than the third impurity concentration onthe side of the semiconductor layer adjacent the on-chip lens.
 10. Alight receiving element, comprising: a semiconductor layer having alight receiving surface; an on-chip lens disposed adjacent the lightreceiving surface of the semiconductor layer; a multi wiring layerdisposed adjacent a surface opposite to the light receiving surface ofthe semiconductor layer, wherein the semiconductor layer is arrangedbetween the on-chip lens and the multi wiring layer; a first voltageapplication unit configured to apply a first voltage to thesemiconductor layer; a second voltage application unit configured toapply a second voltage to the semiconductor layer; a first chargedetection unit; a second charge detection unit, wherein the first chargedetection unit is spaced apart from the second charge detection unit,and wherein the on-chip lens overlaps the first and second chargedetection units; a first wiring connected to the first voltageapplication unit and disposed in the multi wiring layer; a second wiringconnected to the second voltage application unit and disposed in themulti wiring layer; and a reflection member disposed in the multi wiringlayer, wherein the reflection member overlaps at least one of the firstcharge detection unit or the second charge detection unit, and whereinat least a portion of the first wiring, at least a portion of the secondwiring, and the reflection member are in a layer of the multi wiringlayer closest to the semiconductor layer.
 11. The light receivingelement according to claim 10, further comprising a plurality ofreflection members disposed in the multi wiring layer, wherein a firstreflection member included in the plurality of reflection members atleast partially overlaps the first charge detection unit, and wherein asecond reflection member included in the plurality of reflection membersat least partially overlaps the second charge detection unit.
 12. Thelight receiving element according to claim 10, wherein the reflectionmember includes a metal film.
 13. The light receiving element accordingto claim 10, wherein the reflection member is symmetrically arranged ina region on the first charge detection unit side and a region on thesecond charge detection unit side.
 14. The light receiving elementaccording to claim 10, wherein the reflection member is arranged only ina pixel center region.
 15. The light receiving element according toclaim 10, wherein the first voltage application unit, the second voltageapplication unit, the first charge detection unit, and the second chargedetection unit are in contact with the multi wiring layer.
 16. The lightreceiving element according to claim 10, wherein the multi wiring layer,including the first wiring, the second wiring, and the reflectionmember, is formed on surface of the semiconductor layer on a sideopposite to a light incident surface side of the semiconductor layer.17. The light receiving element according to claim 10, wherein the firstvoltage application unit or the second voltage application unitincludes, a first region containing an acceptor element at a firstimpurity concentration on a side of the semiconductor layer adjacent themulti wiring layer, and a second region containing an acceptor elementat a second impurity concentration lower than the first impurityconcentration on a side of the semiconductor layer adjacent the on-chiplens.
 18. The light receiving element according to claim 17, wherein thefirst charge detection unit or the second charge detection unitincludes, a third region containing a donor element at a third impurityconcentration on the side of the semiconductor layer adjacent the multiwiring layer, and a fourth region containing a donor element at a secondimpurity concentration lower than the third impurity concentration onthe side of the semiconductor layer adjacent the on-chip lens.